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Hirohito Ito

Canon Inc.

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Publication

Featured researches published by Hirohito Ito.

Archive | 1998

Positioning apparatus and exposure apparatus using the same

Eiji Osanai; Kotaro Akutsu; Hirohito Ito

Archive | 2000

Positioning device, exposure device, and device manufacturing method

Hirohito Ito; Kotaro Akutsu

Archive | 1997

Stage feeding device

Kotaro Akutsu; Eiji Osanai; Hirohito Ito

Archive | 2006

OPTICAL ELEMENT HOLDING APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

Shigeo Sakino; Hirohito Ito; Shinji Uchida; Choshoku Sai; Katsumi Asada

Archive | 2007

OPTICAL ELEMENT DRIVING APPARATUS

Hirohito Ito

Archive | 1998

Positioning device and exposure system provided therewith

Hirohito Ito; Eiji Osanai; Kotaro Tsui; 博仁 伊藤; 浩太郎 堆; 英司 小山内

Archive | 1997

Stage device, method of controlling same, and exposure apparatus using said stage device

Hirohito Ito; Kotaro Akutsu

Archive | 2002

Strain measuring instrument, strain suppressing device, exposure system, and method of manufacturing device

Yasushi Isobe; Hirohito Ito; Kotaro Tsui; 博仁 伊藤; 浩太郎 堆; 裕史 磯部

Archive | 2006

Reflecting mirror and exposure apparatus using the same

Shinji Uchida; Choshoku Sai; Katsumi Asada; Hirohito Ito; Shigeo Sakino

Archive | 2003

STAGE AND METHOD OF CONTROLLING STAGE

Yasushi Isobe; Hirohito Ito; Akira Nawata; Kotaro Tsui; 博仁 伊藤; 浩太郎 堆; 裕史 磯部; 亮 縄田

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Kotaro Akutsu

Canon Inc.

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Eiji Osanai

Canon Inc.

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Choshoku Sai

Canon Inc.

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Katsumi Asada

Canon Inc.

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Shigeo Sakino

Canon Inc.

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Shinji Uchida

Canon Inc.

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Yusuke Sugiyama

Canon Inc.

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Kazunori Iwamoto

Canon Inc.

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Makoto Miyazaki

Canon Inc.

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Mitsuru Inoue

Canon Inc.

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