Is this you? Create Your Porfile
Avatar

Hiroko Sugiyama

Nagoya Institute of Technology

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Hiroko Sugiyama is active.

Explore More

Publication

Featured researches published by Hiroko Sugiyama.

international conference on solid state sensors actuators and microsystems | 2017

World-first electronic imaging of subcritical slip growth in single crystal silicon under fatigue loading

Shoji Kamiya; Akira Kongo; Hiroko Sugiyama; Hayato Izumi

Silicon slips under repeated loading, which quite likely causes fatigue failure after a certain number of cycles to accumulate subcriticai damages. By fabricating p-n junctions over stress concentration areas, traces of slip deformation in single crystal silicon subjected to cyclic compression stress was successfully captured in electron beam induced current (EBIC) images obtained with a field-emission scanning electron microscope. These images would blow away the mirage of long-believed surface oxidation originated fatigue fracture.

Sensors and Actuators A-physical | 2018

Electronic imaging of subcritical defect accumulation in single crystal silicon under fatigue loading

Shoji Kamiya; Akira Kongo; Hiroko Sugiyama; Hayato Izumi

The Proceedings of Mechanical Engineering Congress, Japan | 2017

Observation of crystal slips in single crystal silicon by electron beam induced current under fatigue loading

Shoji Kamiya; Akira Kongou; Hiroko Sugiyama; Hayato Izumi

The Proceedings of Conference of Tokai Branch | 2013

533 Correlation between adhesion strength and local deformation by in-situ observation for Cu grain structure during Cu/SiN interface debonding test

Yuya Matsuse; Nobuyuki Shishido; Shoji Kamiya; Hisashi Sato; Hiroko Sugiyama; Kozo Koiwa; Masahiro Nishida; Masaki Omiya; Takashi Suzuki; Tomoji Nakamura; Toshiaki Suzuki; Takeshi Nokuo

The Proceedings of Conference of Tokai Branch | 2013

534 Influence of Cu Crystal Orientation on Local Adhesion Strength of Interface Between Cu and SiN Semiconductor Device Wirings

Yuka Oura; Hiroko Sugiyama; Nobuyuki Shishido; Shoji Kamiya; Hisashi Sato; Kozo Koiwa; Masahiro Nishida; Masaki Omiya; Takashi Suzuki; Tomoji Nakamura; Toshiaki Suzuki; Takeshi Nokuo

The Proceedings of the Materials and Mechanics Conference | 2012

OS1902 Local adhesion strength of multi-grain Cu / insulation layer interface in sub-micron copper damascene wiring systems

Shinsuke Watanabe; Nobuyuki Shishido; Shoji Kamiya; Hisashi Sato; Kozo Koiwa; Hiroko Sugiyama; Masahiro Nishida; Masaki Omiya; Takashi Suzuki; Tomoji Nakamura; Toshiaki Suzuki; Takeshi Nokuo

The Proceedings of the Materials and Mechanics Conference | 2012

OS1901 Influence of Crystal Orientation on Sub-Grain Scale Adhesion Strength of Interface between Cu and Insulation Layer in LSI Interconnect Systems

Yuka Oura; Nobuyuki Shishido; Shoji Kamiya; Hisashi Sato; Kozo Koiwa; Masahiro Nishida; Hiroko Sugiyama; Masaki Omiya; Takashi Suzuki; Tomoji Nakamura; Toshiaki Suzuki; Takeshi Nokuo

The Proceedings of the Materials and Mechanics Conference | 2012

OS1903 Local mechanical property mapping of copper interconnects for the reliability design of semiconductor devices

Keita Takazono; Nobuyuki Shishido; Shoji Kamiya; Hisashi Sato; Kozo Koiwa; Hiroko Sugiyama; Masahiro Nishida; Masaki Omiya; Takashi Suzuki; Tomoji Nakamura; Toshiaki Suzuki; Takeshi Nokuo

The Proceedings of Conference of Tokai Branch | 2012

530 Local mechanical property evaluation of LSI copper interconnects by combining in-situ SEM nanoindentation with crystal orientation mapping by electron backscattering diffraction analysis

Keita Takazono; Nobuyuki Shishido; Shoji Kamiya; Hisashi Sato; Kozo Koiwa; Hiroko Sugiyama; Chuantong Chen; Masahiro Nishida; Masaki Omiya; Takashi Suzuki; Tomoji Nakamura; Tadahiro Nagasawa; Takeshi Nokuo

The Proceedings of Conference of Tokai Branch | 2012

529 Trial of evaluation for the correlation between local interface strength and grain distribution on damascene interconnects

Shinsuke Watanabe; Nobuyuki Shishido; Shoji Kamiya; Hisashi Sato; Kozo Koiwa; Hiroko Sugiyama; Chuantong Chen; Masahiro Nishida; Masaki Omiya; Takashi Suzuki; Tomoji Nakamura; Tadahiro Nagasawa; Takeshi Nokuo

Explore More

Collaboration

Dive into the Hiroko Sugiyama's collaboration.

Top Co-Authors
Avatar

Shoji Kamiya

Nagoya Institute of Technology

View shared research outputs
Top Co-Authors
Avatar

Hisashi Sato

Nagoya Institute of Technology

View shared research outputs
Top Co-Authors
Avatar

Kozo Koiwa

Nagoya Institute of Technology

View shared research outputs
Top Co-Authors
Avatar

Masahiro Nishida

Nagoya Institute of Technology

View shared research outputs
Top Co-Authors
Avatar

Masaki Omiya

Keio University

View shared research outputs
Top Co-Authors
Avatar

Nobuyuki Shishido

Nagoya Institute of Technology

View shared research outputs
Top Co-Authors
Avatar

Takashi Suzuki

Fujitsu

View shared research outputs
Top Co-Authors
Avatar

Takeshi Nokuo

JEOL Ltd.

View shared research outputs
Top Co-Authors
Avatar

Tomoji Nakamura

Fujitsu

View shared research outputs
Top Co-Authors
Avatar

Toshiaki Suzuki

JEOL Ltd.

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge