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Hiroshi Echizen

Canon Inc.

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Publication

Featured researches published by Hiroshi Echizen.

Archive | 1995

Process for continuously forming a large area functional deposited film by a microwave PCVD method and an apparatus suitable for practicing the same

Jinsho Matsuyama; Toshimitsu Kariya; Yasushi Fujioka; Tetsuya Takei; Katsumi Nakagawa; Masahiro Kanai; Hiroshi Echizen

Archive | 1995

Method and apparatus for continuously forming functional deposited films with a large area by a microwave plasma CVD method

Hiroshi Echizen; Yasushi Fujioka; Katsumi Nakagawa; Masahiro Kanai; Toshimitsu Kariya; Jinsho Matsuyama; Tetsuya Takei

Archive | 1990

Method for continuously forming functional deposited films with a large area by a microwave plasma cvd method

Hiroshi Echizen; Yasushi Fujioka; Katsumi Nakagawa; Masahiro Kanai; Toshimitsu Kariya; Jinsho Matsuyama; Tetsuya Takei

Archive | 1996

Deposited-film forming process and deposited-film forming apparatus

Koichiro Moriyama; Hiroshi Echizen; Masahiro Kanai; Hirokazu Ohtoshi; Takehito Yoshino; Atsushi Yasuno; Kohei Yoshida; Yusuke Miyamoto

Archive | 1992

Continuous film-forming process using microwave energy in a moving substrate web functioning as a substrate and plasma generating space

Jinsho Matsuyama; Toshimitsu Kariya; Yasushi Fujioka; Tetsuya Takei; Katsumi Nakagawa; Masahiro Kanai; Hiroshi Echizen

Archive | 1990

MICROWAVE PCVD METHOD FOR CONTINUOUSLY FORMING A LARGE AREA FUNCTIONAL DEPOSITED FILM USING A CURVED MOVING SUBSTRATE WEB WITH MICROWAVE ENERGY WITH A DIRECTIVITY IN ONE DIRECTION PERPENDICULAR TO THE DIRECTION OF MICROWAVE PROPAGATION

Masahiro Kanai; Jinsho Matsuyama; Katsumi Nakagawa; Toshimitsu Kariya; Yasushi Fujioka; Tetsuya Takei; Hiroshi Echizen

Archive | 1988

Illuminance distribution measuring system

Hiroshi Echizen; Masakatsu Ota; Akiyoshi Suzuki

Archive | 2002

Wet-process gas treatment method and wet-process gas treatment apparatus

Hiroshi Echizen; Hiroshi Izawa

Archive | 1989

Microwave chemical vapor deposition apparatus and feedback control method

Hiroshi Echizen; Satoshi Takaki

Archive | 1995

Microwave chemical vapor deposition apparatus

Hiroshi Echizen; Satoshi Takaki

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Masahiro Kanai

Canon Inc.

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Jinsho Matsuyama

Canon Inc.

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Katsumi Nakagawa

Canon Inc.

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Tetsuya Takei

Canon Inc.

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Toshimitsu Kariya

Canon Inc.

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Yasushi Fujioka

Canon Inc.

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Hirokazu Ohtoshi

Canon Inc.

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Hiroshi Izawa

Canon Inc.

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Atsushi Yasuno

Canon Inc.

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Kohei Yoshida

Canon Inc.

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