Hirosi Sobukawa | Researchain

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Archive | 2004

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

Nobuharu Noji; Tohru Satake; Hirosi Sobukawa; Toshifumi Kimba; Masahiro Hatakeyama; Shoji Yoshikawa; Takeshi Murakami; Kenji Watanabe; Tsutomu Karimata; Kenichi Suematsu; Yutaka Tabe; Ryo Tajima; Keiichi Tohyama

Archive | 2003

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

Mamoru Nakasuji; Tohru Satake; Kenji Watanabe; Takeshi Murakami; Nobuharu Noji; Hirosi Sobukawa; Tsutomu Karimata; Shoji Yoshikawa; Toshifumi Kimba; Shin Oowada; Mutsumi Saito; Muneki Hamashima; Toru Takagi; Naoto Kihara; Hiroshi Nishimura

Archive | 2004

Sheet beam-type inspection apparatus

Mamoru Nakasuji; Nobuharu Noji; Tohru Satake; Toshifumi Kimba; Hirosi Sobukawa; Tsutomu Karimata; Shin Oowada; Shoji Yoshikawa; Mutsumi Saito

Archive | 2011

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

Toshifumi Kimba; Tohru Satake; Tsutomu Karimata; Kenji Watanabe; Nobuharu Noji; Takeshi Murakami; Masahiro Hatakeyama; Mamoru Nakasuji; Hirosi Sobukawa; Shoji Yoshikawa; Shin Oowada; Mutsumi Saito

Archive | 2001

Method for inspecting substrate, substrate inspecting system and electron beam apparatus

Mamoru Nakasuji; Nobuharu Noji; Tohru Satake; Toshifumi Kimba; Masahiro Hatakeyama; Kenji Watanabe; Hirosi Sobukawa; Tsutomu Karimata; Shoji Yoshikawa; Shin Oowada; Mutsumi Saito; Muneki Hamashima

Archive | 2008

Electron beam inspection system and inspection method and method of manufacturing devices using the system

Kenji Watanabe; Hirosi Sobukawa; Nobuharu Noji; Tohru Satake; Shoji Yoshikawa; Tsutomu Karimata; Mamoru Nakasuji; Masahiro Hatakeyama; Takeshi Murakami; Yuichiro Yamazaki; Ichirota Nagahama; Takamitsu Nagai; Kazuyoshi Sugihara

Archive | 2001

Electron beam apparatus and device production method using the electron beam apparatus

Mamoru Nakasuji; Tohru Satake; Nobuharu Noji; Hirosi Sobukawa; Tsutomu Karimata; Shoji Yoshikawa; Toshifumi Kimba; Shin Oowada; Mutsumi Saito; Muneki Hamashima; Yoshiaki Kohama; Yukiharu Okubo

Archive | 2008