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Hiroyuki Hirota

Nikon

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Publication

Featured researches published by Hiroyuki Hirota.

Archive | 2006

Method of adjusting lighting optical device, lighting optical device, exposure system, and exposure method

Osamu Tanitsu; Hiroyuki Hirota; Koji Shigematsu; Shinichi Kurita

Archive | 2013

Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method

Osamu Tanitsu; Koji Shigematsu; Hiroyuki Hirota; Tomoyuki Matsuyama

Archive | 2008

Illumination optical apparatus, exposure apparatus, and device manufacturing method

Hiroyuki Hirota

Archive | 2005

Polarization conversion element, lighting optical device, exposure system, and exposure method

Osamu Tanitsu; Koji Shigematsu; Hiroyuki Hirota; Tomoyuki Matsuyama

Archive | 2004

DEPOLARIZER, ILLUMINATION OPTICAL DEVICE, ADJUSTING METHOD OF ILLUMINATION OPTICAL DEVICE, EXPOSURE DEVICE, AND MANUFACTURING METHOD OF MICRODEVICE

Hiroyuki Hirota; Norio Miyake; Koji Muramatsu; Osamu Tanitsu; 範夫 三宅; 弘之 廣田; 浩二 村松; 修 谷津

Archive | 2009

Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system

Kouji Muramatsu; Osamu Tanitsu; Hirohisa Tanaka; Masaya Yamamoto; Norio Miyake; Yasushi Mizuno; Ryuji Takaya; Risa Yoshimoto; Hiroyuki Hirota

Archive | 2005

Illumination optical apparatus, exposure apparatus and exposure method

Osamu Tanitsu; Koji Shigematsu; Hiroyuki Hirota; Tomoyuki Matsuyama

Archive | 2005

偏光変換素子、照明光学装置、露光装置、および露光方法

Osamu Tanitsu; Koji Shigematsu; Hiroyuki Hirota; Tomoyuki Matsuyama

Archive | 2009

Illumination optical system, exposure device, device manufacturing method, correction filter, and exposure optical system

Kouji Muramatsu; Osamu Tanitsu; Hirohisa Tanaka; Masaya Yamamoto; Norio Miyake; Yasushi Mizuno; Ryuji Takaya; Risa Yoshimoto; Hiroyuki Hirota

Archive | 2007

Polarizing transforming element, optical lighting device, exposure device and exposure method

Osamu Tanitsu; Koji Shigematsu; Hiroyuki Hirota; Tomoyuki Matsuyama

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Collaboration

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Osamu Tanitsu

Nikon

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Koji Shigematsu

Nikon

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Tomoyuki Matsuyama

Nikon

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Shinichi Kurita

Nikon

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Norio Miyake

Nikon

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Hirohisa Tanaka

Kyushu University

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Kouji Muramatsu

Nikon

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Masaya Yamamoto

Nikon

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Risa Yoshimoto

Nikon

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Ryuji Takaya

Nikon

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