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Koji Shigematsu

Nikon

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Publication

Featured researches published by Koji Shigematsu.

Archive | 2006

Method of adjusting lighting optical device, lighting optical device, exposure system, and exposure method

Osamu Tanitsu; Hiroyuki Hirota; Koji Shigematsu; Shinichi Kurita

Archive | 2013

Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method

Osamu Tanitsu; Koji Shigematsu; Hiroyuki Hirota; Tomoyuki Matsuyama

Archive | 1999

Projection optical system and exposure apparatus and method

Koji Shigematsu

Archive | 2005

Lighting Optical Device, Regulation Method for Lighting Optical Device, Exposure System, and Exposure Method

Hirohisa Tanaka; Koji Shigematsu

Archive | 2007

Illuminating optical apparatus, exposure apparatus and device manufacturing method

Koji Shigematsu; Osamu Tanitsu

Archive | 2005

Polarization conversion element, lighting optical device, exposure system, and exposure method

Osamu Tanitsu; Koji Shigematsu; Hiroyuki Hirota; Tomoyuki Matsuyama

Archive | 2001

Projection optical system, a projection exposure apparatus, and a projection exposure method

Koji Shigematsu; Masayuki Mizusawa; Youhei Fujishima; Miho Matsumoto

Archive | 2005

Lighting optical device, exposure system, and exposure method

Koji Shigematsu

Archive | 2004

ILLUMINATION OPTICAL DEVICE, REGULATING METHOD OF ILLUMINATION OPTICAL DEVICE, EXPOSURE DEVICE AND EXPOSURE METHOD

Koji Shigematsu; Hirohisa Tanaka; 裕久 田中; 幸二 重松

Archive | 2000

Exposure apparatus, a photolithography method, and a device manufactured by the same

Koji Shigematsu

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Collaboration

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Osamu Tanitsu

Nikon

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Hiroyuki Hirota

Nikon

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Tomoyuki Matsuyama

Nikon

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Hirohisa Tanaka

Kyushu University

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Shinichi Kurita

Nikon

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Youhei Fujishima

Nikon

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Masayuki Mizusawa

Nikon

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Yasuhiro Omura

Nikon

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Miho Matsumoto

Nikon

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Toshiro Ishiyama

Nikon

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