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Hiroyuki Miyashita

Tokyo Electron

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Publication

Featured researches published by Hiroyuki Miyashita.

Archive | 2013

Microwave introducing mechanism, microwave plasma source and microwave plasma processing apparatus

Taro Ikeda; Yuki Osada; Shigeru Kasai; Hiroyuki Miyashita

Archive | 2012

MICROWAVE EMISSION MECHANISM, MICROWAVE PLASMA SOURCE AND SURFACE WAVE PLASMA PROCESSING APPARATUS

Taro Ikeda; Hiroyuki Miyashita; Yuki Osada; Yutaka Fujino; Tomohito Komatsu

Archive | 2002

Sheet-type treating device

Shigeru Kasai; Hiroyuki Miyashita

Archive | 2015

ACQUISITION METHOD FOR S-PARAMETERS IN MICROWAVE INTRODUCTION MODULES, AND MALFUNCTION DETECTION METHOD

Taro Ikeda; Yutaka Fujino; Hikaru Adachi; Hiroyuki Miyashita; Yuki Osada; Nobuhiko Yamamoto

Archive | 2013

MICROWAVE RADIATION ANTENNA, MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS

Taro Ikeda; Tomohito Komatsu; Shigeru Kasai; Hiroyuki Miyashita; Yuki Osada; Akira Tanihara; Yutaka Fujino

Archive | 2012

S PARAMETER ACQUISITION METHOD AND ABNORMALITY DETECTION METHOD IN MICROWAVE INTRODUCTION MODULE

Taro Ikeda; 太郎 池田; Yutaka Fujino; 豊 藤野; Hikari Adachi; 光 足立; Hiroyuki Miyashita; 大幸 宮下; Isateru Osada; 勇輝 長田; Nobuhiko Yamamoto; 伸彦 山本

Archive | 1997

Automatic control system and method using same

Shigeru Kasai; Hiroyuki Miyashita

Archive | 2016

TUNER, MICROWAVE PLASMA SOURCE AND IMPEDANCE MATCHING METHOD

Yuki Osada; Hiroyuki Miyashita

Archive | 2015

Power synthesizer and microwave induction mechanism

池田 太郎; Taro Ikeda; 太郎 池田; 大幸 宮下; Hiroyuki Miyashita

Archive | 2015

IMPEDANCE MATCHING SLUG, IMPEDANCE MATCHING DEVICE, ELECTROMAGNETIC WAVE TRANSMISSION DEVICE, ELECTROMAGNETIC WAVE RADIATION DEVICE, AND PLASMA PROCESSING APPARATUS

Hiroyuki Miyashita; Taro Ikeda; Yuki Osada; Tomohito Komatsu

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Collaboration

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Taro Ikeda

Tokyo Electron

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Yuki Osada

Tokyo Electron

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Shigeru Kasai

Tokyo Electron

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Yutaka Fujino

Tokyo Electron

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Tomohito Komatsu

Tokyo Electron

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Nobuhiko Yamamoto

Tokyo Electron

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Akira Tanihara

Tokyo Electron

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Hikaru Adachi

Tokyo Electron

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Masamichi Nomura

Tokyo Electron

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Masatake Yoneda

Tokyo Electron

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