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Yuki Osada

Tokyo Electron

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Publication

Featured researches published by Yuki Osada.

Archive | 2011

Electromagnetic-radiation power-supply mechanism and microwave introduction mechanism

Taro Ikeda; Yuki Osada; Shigeru Kasai

Archive | 2004

Coaxial type impedance matching device and impedance detecting method for plasma generation

Toshiaki Kitamura; Koichi Rokuyama; Shigeru Kasai; Takashi Ogino; Yuki Osada

Archive | 2012

Electromagnetic-radiation power-supply mechanism for exciting a coaxial waveguide by using first and second poles and a ring-shaped reflection portion

Taro Ikeda; Yuki Osada; Shigeru Kasai

Archive | 2012

MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS

Taro Ikeda; Yuki Osada

Archive | 2013

Microwave introducing mechanism, microwave plasma source and microwave plasma processing apparatus

Taro Ikeda; Yuki Osada; Shigeru Kasai; Hiroyuki Miyashita

Archive | 2011

Tuner and microwave plasma source

Shigeru Kasai; Taro Ikeda; Yuki Osada

Archive | 2008

MAGNETRON CONTROL METHOD, MAGNETRON SERVICE LIFE JUDGMENT METHOD, MICROWAVE GENERATION DEVICE, MAGNETRON SERVICE LIFE JUDGMENT DEVICE, PROCESSING DEVICE, COMPUTER PROGRAM, AND STORAGE MEDIUM

Shigeru Kasai; Yuki Osada

Archive | 2012

MICROWAVE EMISSION MECHANISM, MICROWAVE PLASMA SOURCE AND SURFACE WAVE PLASMA PROCESSING APPARATUS

Taro Ikeda; Hiroyuki Miyashita; Yuki Osada; Yutaka Fujino; Tomohito Komatsu

Archive | 2003

Coaxial type impedance matching device

Fumio Yamada; Toshiaki Kitamura; Hiroyuki Kobayashi; Koichi Rokuyama; Akihiro Kubota; Shigeru Kasai; Takashi Ogino; Yuki Osada

Archive | 2012

Surface wave plasma generating antenna and surface wave plasma processing apparatus

Taro Ikeda; Shigeru Kasai; Yuki Osada

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Collaboration

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Taro Ikeda

Tokyo Electron

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Shigeru Kasai

Tokyo Electron

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Hiroyuki Miyashita

Tokyo Electron

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Tomohito Komatsu

Tokyo Electron

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Yutaka Fujino

Tokyo Electron

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Koichi Rokuyama

Tokyo Electron

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Takashi Ogino

Tokyo Electron

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Toshiaki Kitamura

Tokyo Electron

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Akira Tanihara

Tokyo Electron

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Hikaru Adachi

Tokyo Electron

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