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Yutaka Fujino

Tokyo Electron

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Publication

Featured researches published by Yutaka Fujino.

Archive | 2014

Plasma processing apparatus and shower plate

Shigeru Kasai; Taro Ikeda; Yutaka Fujino

Archive | 2012

MICROWAVE EMISSION MECHANISM, MICROWAVE PLASMA SOURCE AND SURFACE WAVE PLASMA PROCESSING APPARATUS

Taro Ikeda; Hiroyuki Miyashita; Yuki Osada; Yutaka Fujino; Tomohito Komatsu

Archive | 2010

METHOD OF FORMING GATE INSULATION FILM, SEMICONDUCTOR DEVICE, AND COMPUTER RECORDING MEDIUM

Tatsuo Nishita; Shuuichi Ishizuka; Yutaka Fujino; Toshio Nakanishi; Yoshihiro Sato

Archive | 2012

PLASMA PROCESSING APPARATUS AND MICROWAVE INTRODUCTION DEVICE

Yutaka Fujino; Atsushi Ueda; Shigenori Ozaki; Junichi Kitagawa

Archive | 2015

ACQUISITION METHOD FOR S-PARAMETERS IN MICROWAVE INTRODUCTION MODULES, AND MALFUNCTION DETECTION METHOD

Taro Ikeda; Yutaka Fujino; Hikaru Adachi; Hiroyuki Miyashita; Yuki Osada; Nobuhiko Yamamoto

Archive | 2013

MICROWAVE RADIATION ANTENNA, MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS

Taro Ikeda; Tomohito Komatsu; Shigeru Kasai; Hiroyuki Miyashita; Yuki Osada; Akira Tanihara; Yutaka Fujino

Archive | 2012

S PARAMETER ACQUISITION METHOD AND ABNORMALITY DETECTION METHOD IN MICROWAVE INTRODUCTION MODULE

Taro Ikeda; 太郎 池田; Yutaka Fujino; 豊 藤野; Hikari Adachi; 光 足立; Hiroyuki Miyashita; 大幸 宮下; Isateru Osada; 勇輝 長田; Nobuhiko Yamamoto; 伸彦 山本

Archive | 2017

METHOD FOR MANUFACTURING INSULATING FILM LAMINATED STRUCTURE

Junya Miyahara; Yutaka Fujino; Genji Nakamura; Kentaro Shiraga

Archive | 2012

Mécanisme d'émission de micro-ondes, source de plasma à micro-ondes et dispositif de traitement par plasma à ondes de surface

Taro Ikeda; 池田 太郎; Hiroyuki Miyashita; 大幸 宮下; Yuki Osada; 長田 勇輝; Yutaka Fujino; 藤野 豊; Tomohito Komatsu; 智仁 小松

Archive | 2012

Microwave emission mechanism, microwave plasma source and surface wave plasma processing device

Taro Ikeda; 池田 太郎; Hiroyuki Miyashita; 大幸 宮下; Yuki Osada; 長田 勇輝; Yutaka Fujino; 藤野 豊; Tomohito Komatsu; 智仁 小松

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Collaboration

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Taro Ikeda

Tokyo Electron

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Hiroyuki Miyashita

Tokyo Electron

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Yuki Osada

Tokyo Electron

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Tomohito Komatsu

Tokyo Electron

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Nobuhiko Yamamoto

Tokyo Electron

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Shigeru Kasai

Tokyo Electron

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Shuuichi Ishizuka

Tokyo Electron

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Tatsuo Nishita

Tokyo Electron

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Toshio Nakanishi

Tokyo Electron

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Akira Tanihara

Tokyo Electron

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