Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Yutaka Fujino is active.

Publication


Featured researches published by Yutaka Fujino.


Archive | 2014

Plasma processing apparatus and shower plate

Shigeru Kasai; Taro Ikeda; Yutaka Fujino


Archive | 2012

MICROWAVE EMISSION MECHANISM, MICROWAVE PLASMA SOURCE AND SURFACE WAVE PLASMA PROCESSING APPARATUS

Taro Ikeda; Hiroyuki Miyashita; Yuki Osada; Yutaka Fujino; Tomohito Komatsu


Archive | 2010

METHOD OF FORMING GATE INSULATION FILM, SEMICONDUCTOR DEVICE, AND COMPUTER RECORDING MEDIUM

Tatsuo Nishita; Shuuichi Ishizuka; Yutaka Fujino; Toshio Nakanishi; Yoshihiro Sato


Archive | 2012

PLASMA PROCESSING APPARATUS AND MICROWAVE INTRODUCTION DEVICE

Yutaka Fujino; Atsushi Ueda; Shigenori Ozaki; Junichi Kitagawa


Archive | 2015

ACQUISITION METHOD FOR S-PARAMETERS IN MICROWAVE INTRODUCTION MODULES, AND MALFUNCTION DETECTION METHOD

Taro Ikeda; Yutaka Fujino; Hikaru Adachi; Hiroyuki Miyashita; Yuki Osada; Nobuhiko Yamamoto


Archive | 2013

MICROWAVE RADIATION ANTENNA, MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS

Taro Ikeda; Tomohito Komatsu; Shigeru Kasai; Hiroyuki Miyashita; Yuki Osada; Akira Tanihara; Yutaka Fujino


Archive | 2012

S PARAMETER ACQUISITION METHOD AND ABNORMALITY DETECTION METHOD IN MICROWAVE INTRODUCTION MODULE

Taro Ikeda; 太郎 池田; Yutaka Fujino; 豊 藤野; Hikari Adachi; 光 足立; Hiroyuki Miyashita; 大幸 宮下; Isateru Osada; 勇輝 長田; Nobuhiko Yamamoto; 伸彦 山本


Archive | 2017

METHOD FOR MANUFACTURING INSULATING FILM LAMINATED STRUCTURE

Junya Miyahara; Yutaka Fujino; Genji Nakamura; Kentaro Shiraga


Archive | 2012

Mécanisme d'émission de micro-ondes, source de plasma à micro-ondes et dispositif de traitement par plasma à ondes de surface

Taro Ikeda; 池田 太郎; Hiroyuki Miyashita; 大幸 宮下; Yuki Osada; 長田 勇輝; Yutaka Fujino; 藤野 豊; Tomohito Komatsu; 智仁 小松


Archive | 2012

Microwave emission mechanism, microwave plasma source and surface wave plasma processing device

Taro Ikeda; 池田 太郎; Hiroyuki Miyashita; 大幸 宮下; Yuki Osada; 長田 勇輝; Yutaka Fujino; 藤野 豊; Tomohito Komatsu; 智仁 小松

Collaboration


Dive into the Yutaka Fujino's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge