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Hisae Shibuya

Hitachi

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Publication

Featured researches published by Hisae Shibuya.

Archive | 2006

Method for analyzing defect data and inspection apparatus and review system

Hisae Shibuya; Yuji Takagi

Archive | 2010

Method and device for monitoring the state of a facility

Hisae Shibuya; Shunji Maeda

Archive | 2003

Method and Apparatus for Analyzing Defect Data and a Review System

Hisae Shibuya; Yuji Takagi

Archive | 2009

Anomaly Detection Method and Anomaly Detection System

Shunji Maeda; Hisae Shibuya

Archive | 2004

Defect review method and its device

Munenori Fukunishi; Hisae Shibuya; Yuji Takagi; 久恵 渋谷; 宗憲 福西; 裕治 高木

Archive | 2013

DEFECT CLASSIFICATION METHOD AND APPARATUS, AND DEFECT INSPECTION APPARATUS

Hisae Shibuya; Shunji Maeda; Akira Hamamatsu

Archive | 2012

Inspecting Method and Inspecting Apparatus for Substrate Surface

Akira Hamamatsu; Yoshimasa Oshima; Shunji Maeda; Hisae Shibuya; Yuta Urano; Toshiyuki Nakao; Shigenobu Maruyama

Archive | 2006

Method and apparatus for inspecting a defect of a pattern

Kaoru Sakai; Shunji Maeda; Hisae Shibuya; Hidetoshi Nishiyama

Archive | 2010

Method and device for monitoring state of facility

Shunji Maeda; Hisae Shibuya; 俊二 前田; 久恵 渋谷

Archive | 2010

Apparatus of inspecting defect in semiconductor and method of the same

Akira Hamamatsu; Shunji Maeda; Hisae Shibuya

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Collaboration

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Shunji Maeda

Hitachi

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Yuji Takagi

Hitachi

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Akira Hamamatsu

Hitachi

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Kenji Obara

Hitachi

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Tadashi Suzuki

Hitachi

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Shun'ichi Kaneko

Hokkaido University

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Hiroyuki Magara

Hitachi

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Hidenori Takauji

Hokkaido University

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Naoki Hosoya

Okayama University

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Hidetoshi Nishiyama

Hitachi

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