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Latest external collaboration on country level. Dive into details by clicking on the dots.

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Dive into the research topics where Kenji Obara is active.

Publication


Featured researches published by Kenji Obara.


Archive | 2006

Method and apparatus for reviewing defects

Minoru Harada; Ryo Nakagaki; Kenji Obara; Atsushi Miyamoto


Archive | 1999

Scanning electron microscope having magnification switching control

Ryo Nakagaki; Yuji Takagi; Atsushi Shimoda; Kenji Obara; Yasuhiko Ozawa; Hideka Bamba; Seiji Isogai; Kenji Watanabe; Chie Shishido; Toshiei Kurosaki


Archive | 2006

Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus

Kenji Obara; Yuji Takagi; Ryo Nakagaki; Yasuhiro Ozawa; Toshiei Kurosaki; Seiji Isogai


Archive | 2002

Method and apparatus for inspecting defects in a semiconductor wafer

Naoki Hosoya; Yuuji Takagi; Hisae Shibuya; Kenji Obara


Archive | 1999

METHOD AND DEVICE FOR SORTING DEFECTIVE IMAGE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE USING THEM

Shizushi Isogai; Toshishige Kurosaki; Akira Nakagaki; Kenji Obara; Yasuhiko Ozawa; Yuji Takagi; 亮 中垣; 健二 小原; 康彦 小沢; 静志 磯貝; 裕治 高木; 利栄 黒崎


Archive | 2003

Method and apparatus for analyzing composition of defects

Kenji Obara; Yuji Takagi; Hisae Shibuya; Naoki Hosoya


Archive | 2006

Inspecting method, inspecting system, and method for manufacturing electronic devices

Yoko Ikeda; Junko Konishi; Hisafumi Iwata; Yuji Takagi; Kenji Obara; Ryo Nakagaki; Seiji Isogai; Yasuhiko Ozawa


Archive | 2003

Method and apparatus for analyzing defect information

Kenji Obara; Yuji Takagi; Hisae Shibuya


Archive | 2012

PATTERN DEFECT ANALYSIS EQUIPMENT, PATTERN DEFECT ANALYSIS METHOD AND PATTERN DEFECT ANALYSIS PROGRAM

Norio Satou; Susumu Koyama; Masashi Sakamoto; Kenji Obara


Archive | 2005

OBSERVATION METHOD FOR SAMPLE BY USE OF SCANNING TYPE ELECTRON MICROSCOPE AND ITS DEVICE

Kazuo Aoki; Munenori Fukunishi; Toshifumi Honda; Kenji Obara; Hiroto Okuda; Masafumi Sakamoto; Kohei Yamaguchi; 雅史 坂本; 浩人 奥田; 健二 小原; 宏平 山口; 敏文 本田; 宗憲 福西; 一雄 青木

Collaboration


Dive into the Kenji Obara's collaboration.

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