Ho-Ki Lee

Methods of manufacturing semiconductor devices and semiconductor devices manufactured using such a method

METHODS AND APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE IN A PROCESSING CHAMBER

Method forming contact plug for semiconductor device using H2 remote plasma treatment

APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICES AND SUBSTRATES

LOW RESISTIVITY CONDUCTIVE STRUCTURES, DEVICES AND SYSTEMS INCLUDING SAME, AND METHODS FORMING SAME

Method for forming silicide contacts

APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT BY SINGLE CHAMBER

Methods of calculating thicknesses of layers and methods of forming layers using the same

Methods of Forming Electrical Interconnects Using Non-Uniformly Nitrified Metal Layers and Interconnects Formed Thereby

METHOD OF MAINTAINING A SEMICONDUCTOR PRODUCTION LINE