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Horst Engel

Leica Microsystems

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Publication

Featured researches published by Horst Engel.

Archive | 2001

Optical measurement arrangement having an ellipsometer

Hakon Mikkelsen; Horst Engel; Lambert Danner; Christof Stey

Archive | 2003

Method for automatic determination of optical parameters of a layer stack and computer program

Hans-Artur Bosser; Horst Engel

Archive | 2003

Method and apparatus for the determination of layer thicknesses

Hakon Mikkelsen; Horst Engel; Joachim Wienecke

Archive | 2003

Method for the determination of layer thicknesses

Hakon Mikkelsen; Horst Engel; Joachim Wienecke

Archive | 2001

Optical measurement arrangement, in particular for layer thickness measurement

Horst Engel; Hakon Mikkelsen; Lambert Danner; Matthias Slodowski; Kuno Backhaus; Joachim Wienecke

Archive | 2004

Verfahren zur Automatischen Ermittlung optischer Parameter eines Schichtstapels

Hans Artur Bösser; Horst Engel

Archive | 2001

Optical measuring device with elliptic polarimeter

Lambert Danner; Horst Engel; Hakon Mikkelsen; Christof Stey; シュタイ クリストフ; ミッケルゼン ハーコン; エンゲル ホルスト; ダナー ラムベルト

Archive | 2001

Optische Messanordnung mit einem Ellipsometer

Lambert Danner; Horst Engel; Hakon Mikkelsen; Christof Stey

Archive | 2003

Method for deciding layer thickness

Horst Engel; Hakon Mikkelsen; Joachim Wienecke; ミッケルゼン ハーコン; エンゲル ホルスト; ヴィーンエッケ ヨアヒム

Archive | 2002

Verfahren zur Bestimmung von Schichtdicken A method for the determination of layer thicknesses

Horst Engel; Hakon Mikkelsen; Joachim Wienecke

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Collaboration

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Hakon Mikkelsen

Leica Microsystems

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Lambert Danner

Leica Microsystems

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Christof Stey

Leica Microsystems

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Joachim Wienecke

Leica Microsystems

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Kuno Backhaus

Leica Microsystems

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Matthias Slodowski

Leica Microsystems

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Hans Artur Bösser

Leica Microsystems

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