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Hyun-Mog Park

Intel

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Publication

Featured researches published by Hyun-Mog Park.

Archive | 2002

Air gap interconnect method

Hyun-Mog Park; Grant M. Kloster

Archive | 2002

Creating air gap in multi-level metal interconnects using electron beam to remove sacrificial material

Grant M. Kloster; Jihperng Leu; Hyun-Mog Park

Archive | 2003

Forming thin hard mask over air gap or porous dielectric

Grant M. Kloster; Kevin P. O'brien; David H. Gracias; Hyun-Mog Park; Vijayakumar S. Ramachandrarao

Archive | 2004

Air gap interconnect structure and method

Hyun-Mog Park; Grant M. Kloster

Archive | 2004

Forming a porous dielectric layer and structures formed thereby

Boyan Boyanov; Grant M. Kloster; Vijay Ramachandrarao; Hyun-Mog Park

Archive | 2007

Dielectric with sidewall passivating layer

Hyun-Mog Park

Archive | 2005

Interconnect structure for an integrated circuit and method of fabrication

Jun He; Jose Maiz; Hyun-Mog Park

Archive | 2002

METHOD OF MAKING A SEMICONDUCTOR DEVICE BY FORMING A MASKING LAYER WITH A TAPERED ETCH PROFILE

Hyun-Mog Park; Jihperng Leu; Chih-I Wu

Archive | 2005

Etch stopless dual damascene structure and method of fabrication

Hyun-Mog Park; Chin-Chang Cheng

Archive | 2005

Sealing porous dielectric material using plasma-induced surface polymerization

Vijayakumar S. Ramachandrarao; Boyan Boyanov; Grant M. Kloster; Hyun-Mog Park

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Collaboration

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Grant M. Kloster

Intel

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Vijayakumar S. Ramachandrarao

Intel

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Jihperng Leu

National Chiao Tung University

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Boyan Boyanov

Intel

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David H. Gracias

Johns Hopkins University

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Bob Turkot

Intel

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Jose Maiz

Intel

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Jun He

Intel

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Kevin P. O'brien

Intel

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Subramanyam Iyer

Intel

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