Hyun-Mog Park

Air gap interconnect method

Creating air gap in multi-level metal interconnects using electron beam to remove sacrificial material

Forming thin hard mask over air gap or porous dielectric

Air gap interconnect structure and method

Forming a porous dielectric layer and structures formed thereby

Dielectric with sidewall passivating layer

Interconnect structure for an integrated circuit and method of fabrication

METHOD OF MAKING A SEMICONDUCTOR DEVICE BY FORMING A MASKING LAYER WITH A TAPERED ETCH PROFILE

Etch stopless dual damascene structure and method of fabrication

Sealing porous dielectric material using plasma-induced surface polymerization