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Ian J. Brown

Tokyo Electron

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Publication

Featured researches published by Ian J. Brown.

Archive | 2006

Method for removing damaged dielectric material

Ian J. Brown

Archive | 2006

METHOD FOR SELECTIVE REMOVAL OF DAMAGED MULTI-STACK BILAYER FILMS

Sandra Hyland; Ian J. Brown; Yannick Feurprier

Archive | 2011

Etch system and method for single substrate processing

Ian J. Brown; Wallace P. Printz

Archive | 2007

METHOD AND SYSTEM FOR PATTERNING A DIELECTRIC FILM

Ian J. Brown

Archive | 2014

UV-Assisted Stripping of Hardened Photoresist to Create Chemical Templates for Directed Self-Assembly

Mark H. Somervell; Ian J. Brown; Ihsan Simms; Ainhoa Romo Negreira; Kathleen Nafus

Archive | 2015

Method and Hardware for Enhanced Removal of Post Etch Polymer and Hardmask Removal

Ian J. Brown; Junjun Liu

Archive | 2014

SUBSTRATE CLEANING METHOD AND SYSTEM USING ATMOSPHERIC PRESSURE ATOMIC OXYGEN

Ian J. Brown

Archive | 2012

SEQUENTIAL STAGE MIXING FOR SINGLE SUBSTRATE STRIP PROCESSING

Ian J. Brown

Archive | 2011

Line pattern collapse mitigation through gap-fill material application

Mark H. Somervell; Benjamen M. Rathsack; Ian J. Brown; Steven Scheer; Joshua S. Hooge

Microelectronic Engineering | 2014

UV-induced modification of fluorocarbon for improvement of subsequent wet removal

Quoc Toan Le; Ihsan Simms; H. Yue; Ian J. Brown; E. Kesters; G. Vereecke; Herbert Struyf; S. De Gendt

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Collaboration

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Wallace P. Printz

Tokyo Electron

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Benjamen M. Rathsack

Tokyo Electron

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Ihsan Simms

Tokyo Electron

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Mark H. Somervell

Tokyo Electron

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Herbert Struyf

Katholieke Universiteit Leuven

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Quoc Toan Le

Katholieke Universiteit Leuven

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Joshua S. Hooge

Tokyo Electron

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Sandra Hyland

Tokyo Electron

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Yannick Feurprier

Tokyo Electron

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E. Kesters

Katholieke Universiteit Leuven

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