Benjamen M. Rathsack | Researchain

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Publication

Featured researches published by Benjamen M. Rathsack.

Archive | 2007

Enhanced process yield using a hot-spot library

Benjamen M. Rathsack; Kathleen Nafus; Steven Scheer

Archive | 2012

METHOD OF FORMING PATTERNS USING BLOCK COPOLYMERS AND ARTICLES THEREOF

Benjamen M. Rathsack; Mark H. Somervell; Meenakshisundaram Gandhi

Archive | 2014

USE OF GRAPHO-EPITAXIAL DIRECTED SELF-ASSEMBLY TO PRECISELY CUT LINES

Mark H. Somervell; Benjamen M. Rathsack

Archive | 2010

Simplified micro-bridging and roughness analysis

Benjamen M. Rathsack

Archive | 2014

Use of topography to direct assembly of block copolymers in grapho-epitaxial applications

Mark H. Somervell; Makoto Muramatsu; Benjamen M. Rathsack; Tadatoshi Tomita; Hisashi Genjima; Hidetami Yaegashi; Kenichi Oyama

Archive | 2014

Topography minimization of neutral layer overcoats in directed self-assembly applications

Mark H. Somervell; Benjamen M. Rathsack

Archive | 2014

Multi-step bake apparatus and method for directed self-assembly lithography control

Benjamen M. Rathsack

Archive | 2015

Methods and Techniques to use with Photosensitized Chemically Amplified Resist Chemicals and Processes

Michael A. Carcasi; Joshua S. Hooge; Benjamen M. Rathsack; Seiji Nagahara

Archive | 2015

METROLOGY FOR MEASUREMENT OF PHOTOSENSITIZER CONCENTRATION WITHIN PHOTO-SENSITIZED CHEMICALLY-AMPLIFIED RESIST (PS-CAR)

Michael A. Carcasi; Mark H. Somervell; Joshua S. Hooge; Benjamen M. Rathsack; Seiji Nagahara

Archive | 2016

USE OF GRAPHO-EPITAXIAL DIRECTED SELF-ASSEMBLY APPLICATIONS TO PRECISELY CUT LOGIC LINES

Mark H. Somervell; Benjamen M. Rathsack

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Collaboration

Dive into the Benjamen M. Rathsack's collaboration.

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Mark H. Somervell

Tokyo Electron

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Joshua S. Hooge

Tokyo Electron

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Michael A. Carcasi

Tokyo Electron

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Steven Scheer

Tokyo Electron

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Ian J. Brown

Tokyo Electron

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Seiji Nagahara

Tokyo Electron

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Wallace P. Printz

Tokyo Electron

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Anton J. Devilliers

Tokyo Electron

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Brian Head

Tokyo Electron

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Carlos A. Fonseca

Tokyo Electron

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