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Ian J. Morey

Lam Research

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Publication

Featured researches published by Ian J. Morey.

Archive | 2002

Convertible hot edge ring to improve low-K dielectric etch

Janet M. Flanner; Susan Ellingboe; Christine M. Janowiak; John Lang; Ian J. Morey

Archive | 1999

Technique for etching a low capacitance dielectric layer

Ian J. Morey; Susan Ellingboe; Janet M. Flanner; Christine M. Janowiak; John Lang

Archive | 1998

Techniques for etching a low capacitance dielectric layer on a substrate

Susan Ellingboe; Janet M. Flanner; Ian J. Morey

Archive | 2001

Unique process chemistry for etching organic low-k materials

Helen Zhu; James R. Bowers; Ian J. Morey; Wayne Babie; Michael Goss

Archive | 2001

Method for etching dual damascene structures in organosilicate glass

Janet M. Flanner; Ian J. Morey

Archive | 2001

Post-etch photoresist strip with O2 and NH3 for organosilicate glass low-K dielectric etch applications

Rao Annapragada; Ian J. Morey; Chok W. Ho

Archive | 2000

Post etch photoresist strip with hydrogen for organosilicate glass low-κ etch applications

Ting Chien; Janet M. Flanner; Ian J. Morey

Archive | 1998

Self-aligned contacts for semiconductor device

Janet M. Flanner; Linda N. Marquez; Joel M. Cook; Ian J. Morey

Archive | 2003

Method for patterning a layer of a low dielectric constant material

Stephan Lassig; Ian J. Morey

Archive | 1999

Low capacitance dielectric layer etching using hydrogen-nitrogen plasma

Susan Ellingboe; Janet M. Flanner; Ian J. Morey

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Janet M. Flanner

Lam Research

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Susan Ellingboe

Lam Research

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Chok W. Ho

Lam Research

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Rao Annapragada

Lam Research

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Christine M. Janowiak

Lam Research

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Helen Zhu

Lam Research

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James R. Bowers

Lam Research

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John Lang

Lam Research

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Michael Goss

Lam Research

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Ting Chien

Lam Research

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