Ian J. Morey

Convertible hot edge ring to improve low-K dielectric etch

Technique for etching a low capacitance dielectric layer

Techniques for etching a low capacitance dielectric layer on a substrate

Unique process chemistry for etching organic low-k materials

Method for etching dual damascene structures in organosilicate glass

Post-etch photoresist strip with O2 and NH3 for organosilicate glass low-K dielectric etch applications

Post etch photoresist strip with hydrogen for organosilicate glass low-κ etch applications

Self-aligned contacts for semiconductor device

Method for patterning a layer of a low dielectric constant material

Low capacitance dielectric layer etching using hydrogen-nitrogen plasma