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Rao Annapragada

Lam Research

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Publication

Featured researches published by Rao Annapragada.

Archive | 2006

Method of preventing damage to porous low-K materials during resist stripping

Rao Annapragada; Kenji Takeshita

Archive | 2002

Method of preventing damage to organo-silicate-glass materials during resist stripping

Rao Annapragada

Archive | 2004

Methods and apparatus for monitoring a process in a plasma processing system by measuring self-bias voltage

Timothy J. Guiney; Rao Annapragada; Subhash Deshmukh; Chia Cheng Cheng

Archive | 2001

Post-etch photoresist strip with O2 and NH3 for organosilicate glass low-K dielectric etch applications

Rao Annapragada; Ian J. Morey; Chok W. Ho

Archive | 2004

Methods and apparatus for monitoring a process in a plasma processing system by measuring impedance

Chia Cheng Cheng; Timothy J. Guiney; Rao Annapragada; Subhash Deshmukh

Archive | 2004

Methods and apparatus for monitoring a process in a plasma processing system by measuring a plasma frequency

Chia Cheng Cheng; Timothy J. Guiney; Rao Annapragada; Subhash Deshmukh

Archive | 2004

Method of etching with NH3 and fluorine chemistries

Rao Annapragada; Reza Sadjadi

Archive | 2000

Combined resist strip and barrier etch process for dual damascene structures

Rao Annapragada; Reza Sadjadi

Archive | 2004

Minimizing the loss of barrier materials during photoresist stripping

Rao Annapragada; Helen Zhu

Archive | 2004

Method for providing uniform removal of organic material

Rao Annapragada; Odette Turmel; Kenji Takeshita; Lily Zheng; Thomas S. Choi; David R. Pirkle

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Collaboration

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Helen Zhu

Lam Research

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Chia Cheng Cheng

Lam Research

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Chok W. Ho

Lam Research

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Ian J. Morey

Lam Research

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Subhash Deshmukh

Lam Research

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Timothy J. Guiney

Lam Research

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Kenji Takeshita

Lam Research

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Reza Sadjadi

Lam Research

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Odette Turmel

Lam Research

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Thomas S. Choi

Lam Research

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