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Janet M. Flanner

Lam Research

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Publication

Featured researches published by Janet M. Flanner.

Archive | 1996

Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer

Prashant Gadgil; Janet M. Flanner; John P. Jordon; Adrian Doe; Robert P. Chebi

Archive | 2002

Convertible hot edge ring to improve low-K dielectric etch

Janet M. Flanner; Susan Ellingboe; Christine M. Janowiak; John Lang; Ian J. Morey

Archive | 1999

Technique for etching a low capacitance dielectric layer

Ian J. Morey; Susan Ellingboe; Janet M. Flanner; Christine M. Janowiak; John Lang

Archive | 1998

Techniques for etching a low capacitance dielectric layer on a substrate

Susan Ellingboe; Janet M. Flanner; Ian J. Morey

Archive | 2001

Method for etching dual damascene structures in organosilicate glass

Janet M. Flanner; Ian J. Morey

Archive | 2000

Post etch photoresist strip with hydrogen for organosilicate glass low-κ etch applications

Ting Chien; Janet M. Flanner; Ian J. Morey

Archive | 1996

Methods and apparatus for etching self-aligned contacts

Janet M. Flanner; Prashant Gadgil; Linda N. Marquez; Adrian Doe; Joel M. Cook

Archive | 1998

Self-aligned contacts for semiconductor device

Janet M. Flanner; Linda N. Marquez; Joel M. Cook; Ian J. Morey

Archive | 2002

Electronically diagnosing a component in a process line using a substrate signature

Janet M. Flanner; James C. Vetter

Archive | 1999

Low capacitance dielectric layer etching using hydrogen-nitrogen plasma

Susan Ellingboe; Janet M. Flanner; Ian J. Morey

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Ian J. Morey

Lam Research

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Susan Ellingboe

Lam Research

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Linda N. Marquez

Lam Research

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Adrian Doe

Lam Research

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Christine M. Janowiak

Lam Research

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James C. Vetter

Lam Research

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Joel M. Cook

Lam Research

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John Lang

Lam Research

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Prashant Gadgil

Lam Research

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Ting Chien

Lam Research

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