Janet M. Flanner

Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer

Convertible hot edge ring to improve low-K dielectric etch

Technique for etching a low capacitance dielectric layer

Techniques for etching a low capacitance dielectric layer on a substrate

Method for etching dual damascene structures in organosilicate glass

Post etch photoresist strip with hydrogen for organosilicate glass low-κ etch applications

Methods and apparatus for etching self-aligned contacts

Self-aligned contacts for semiconductor device

Electronically diagnosing a component in a process line using a substrate signature

Low capacitance dielectric layer etching using hydrogen-nitrogen plasma