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Ian S. Latchford

Applied Materials

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Publication

Featured researches published by Ian S. Latchford.

Archive | 1994

Passivating, stripping and corrosion inhibition of semiconductor substrates

Jian Chen; James S. Papanu; Steve S. Y. Mak; Carmel Ish-Shalom; Peter Hsieh; Wesley Lau; Charles Steven Rhoades; Brian Shieh; Ian S. Latchford; Karen A. Williams; Victoria Yu-Wang

Archive | 2005

Photolithography scheme using a silicon containing resist

Ian S. Latchford; Christopher Dennis Bencher; Yuxiang Wang; Mario Dave Silvetti

Archive | 2002

Airgap for semiconductor devices

Ian S. Latchford; Christopher Dennis Bencher; Michael D. Armacost; Timothy W. Weidman; Christopher S. Ngai

Archive | 1991

Method for removal of photoresist over metal which also removes or inactivates corrosion-forming materials remaining from one or more previous metal etch steps

Ian S. Latchford; James Dillard

Archive | 1991

Low pressure anisotropic etch process for tantalum silicide or titanium silicide layer formed over polysilicon layer deposited on silicon oxide layer on semiconductor wafer

Ian S. Latchford; Patrica Vasquez; David J. Hemker; Brigitte Petit

Archive | 1992

Process for removal of residues remaining after etching polysilicon layer in formation of integrated circuit structure

Chester A. Szwejkowski; Ian S. Latchford; Isamu Namose; Kazumi Tsuchida

Archive | 1989

Process for etching polysilicon layer in formation of integrated circuit structure

Zahra H. Amini; Ian S. Latchford

Archive | 2001

Enhanced remote plasma cleaning

Thomas Nowak; Ian S. Latchford; Tsutomu Tanaka; Bok Heon Kim; Ping Xu; Jason K. Foster; Heath B. DeShong; Martin Jay Seamons

Archive | 2003

Conductive bi-layer e-beam resist with amorphous carbon

Christopher Dennis Bencher; Ian S. Latchford

Archive | 2008

Wafer processing system and method of producing the wafer

Hari Ponnekanti; Christopher Lane; Ian S. Latchford; Terry Bluck

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Christopher Dennis Bencher

Rice University

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Timothy W. Weidman

Applied Materials

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Kevin Fairbairn

Applied Materials

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Michael R. Rice

Applied Materials

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Christopher Lane

Applied Materials

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Hari Ponnekanti

Applied Materials

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Terry Bluck

Intevac

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Bok Heon Kim

Applied Materials

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Brian Shieh

Applied Materials

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Brigitte Petit

Applied Materials

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