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Ikeda Nobukazu

University of Tokushima

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Publication

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Archive | 2009

Gas supply device equipped with carburetor

Nagata Atsushi; Nagase Masaaki; Hidaka Atsushi; Hirata Kaoru; Matsumoto Atsushi; Nishino Kouji; Dohi Ryousuke; Ikeda Nobukazu

Archive | 2008

CAM TYPE VALVE

Dohi Ryosuke; Nishino Koji; Ikeda Nobukazu; Sawada Yohei

Archive | 2004

Grinding machine for welding electrodes

Ikeda Nobukazu; Morimoto Akihiro; Komehana Katunori; Honiden Teruo

Archive | 2010

Discontinuous switching flow control method of fluid using pressure type flow controller

Ohmi Tadahiro; Nishino Kouji; Dohi Ryousuke; Nagase Masaaki; Sugita Katsuyuki; Hirata Kaoru; Hirose Takashi; Shinohara Tsutomu; Ikeda Nobukazu; Yoshida Toshihide; Tanaka Hisashi

Archive | 2005

Gas distribution supply device and gas distribution supply method for supplying air to chamber by gas supply equipment with flow control device

Sugiyama Kazuhiko; Ikeda Nobukazu; Nishino Koji; Dohi Ryosuke; Uenoyama Toyomi

Archive | 2013

Calibration method and flow-rate measurement method for flow-rate controller of gas supplying apparatus

Nagase Masaaki; Ikeda Nobukazu; Sawada Yohei; Hirai Tooru; Morisaki Kazuyuki; Nishino Kouji; Dohi Ryousuke

Archive | 2012

FLOW RATE MEASURING DEVICE OF FLOW CONTROLLER FOR GAS SUPPLY DEVICE AND METHOD FOR MEASURING FLOW RATE

Sawada Yohei; Nagase Masaaki; Ikeda Nobukazu; Nishino Kouji; Dohi Ryousuke

Archive | 2012

Material vaporization supply device

Hidaka Atsushi; Hirata Kaoru; Nagase Masaaki; Dohi Ryousuke; Nishino Kouji; Ikeda Nobukazu

Archive | 2011

Mixture gas supply device

Nagase Masaaki; Dohi Ryousuke; Nishino Kouji; Ikeda Nobukazu

Archive | 2009

AUTOMATIC PRESSURE REGULATOR FOR FLOW CONTROLLER

Hirata Kaoru; Sugita Katsuyuki; Nishino Kouji; Dohi Ryousuke; Ikeda Nobukazu

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Nishino Kouji

Tohoku University

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Nagase Masaaki

Tohoku University

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Yamaji Michio

University of Tokushima

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Ohmi Tadahiro

Canon Inc.

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Sawada Yohei

Tokyo Electron

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Deguchi Yoshihiro

University of Tokushima

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Yakushijin Tadayuki

University of Tokushima

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Shirai Yasuyuki

Canon Inc.

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Ishii Hidekazu

Tohoku University

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Kuroda Rihito

Tohoku University

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