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Sawada Yohei

Tokyo Electron

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Publication

Featured researches published by Sawada Yohei.

Archive | 2013

Calibration method and flow-rate measurement method for flow-rate controller of gas supplying apparatus

Nagase Masaaki; Ikeda Nobukazu; Sawada Yohei; Hirai Tooru; Morisaki Kazuyuki; Nishino Kouji; Dohi Ryousuke

Archive | 2012

FLOW RATE MEASURING DEVICE OF FLOW CONTROLLER FOR GAS SUPPLY DEVICE AND METHOD FOR MEASURING FLOW RATE

Sawada Yohei; Nagase Masaaki; Ikeda Nobukazu; Nishino Kouji; Dohi Ryousuke

Archive | 2008

PIEZOELECTRIC ELEMENT DRIVING CONTROL VALVE

Sawada Yohei; Hirata Kaoru; Dohi Ryousuke; Nishino Kouji; Ikeda Nobukazu

Archive | 2012

Automatic-valve opening degree detection device

Dohi Ryousuke; Tomita Atsuo; Nishino Kouji; Sawada Yohei; Ikeda Nobukazu

Archive | 2011

Cam type control valve

Sawada Yohei; Dohi Ryousuke; Nishino Kouji; Ikeda Nobukazu

Archive | 2018

VALVE WITH BUILT-IN ORIFICE, AND PRESSURE-TYPE FLOW RATE CONTROL DEVICE

Sawada Yohei; Hirata Kaoru; Nagase Masaaki; Nishino Kouji; Ikeda Nobukazu

Archive | 2018

DISPOSITIF DE RÉGULATION DE DÉBIT, PROCÉDÉ D'ÉTALONNAGE DU DÉBIT D'UN DISPOSITIF DE RÉGULATION DE DÉBIT, DISPOSITIF DE MESURE DE DÉBIT ET PROCÉDÉ DE MESURE DE DÉBIT UTILISANT CE DISPOSITIF DE MESURE DE DÉBIT

Sawada Yohei; 澤田 洋平; Nagase Masaaki; 永瀬 正明; Nishino Kouji; 西野 功二; Ikeda Nobukazu; 池田 信一

Archive | 2018

GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING SYSTEM AND GAS SUPPLY METHOD

Sawachi Atsushi; Amikura Norihiko; Nishino Kouji; Sawada Yohei; Kishida Yoshiharu

Archive | 2018

FLOW RATE CONTROL DEVICE, METHOD OF CALIBRATING FLOW RATE OF FLOW RATE CONTROL DEVICE, FLOW RATE MEASURING DEVICE, AND METHOD OF MEASURING FLOW RATE USING FLOW RATE MEASURING DEVICE

Sawada Yohei; 澤田 洋平; Nagase Masaaki; 永瀬 正明; Nishino Kouji; 西野 功二; Ikeda Nobukazu; 池田 信一

Archive | 2017

Flow rate control device and abnormality detection method using flow rate control device

Nagase Masaaki; Hirata Kaoru; Sawada Yohei; Nishino Kouji; Ikeda Nobukazu

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Nishino Kouji

Tohoku University

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Ikeda Nobukazu

University of Tokushima

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Nagase Masaaki

Tohoku University

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Amikura Norihiko

Tokyo Electron

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Kishida Yoshiharu

Tokyo Electron

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Sawachi Atsushi

Tokyo Electron

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