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Nagase Masaaki

Tohoku University

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Archive | 2008

MATERIAL VAPORIZATION SUPPLY APPARATUS AND AUTOMATIC PRESSURE REGULATOR USED THEREFOR

Hirata Kaoru; Nagase Masaaki; Hidaka Atsushi; Matsumoto Atsushi; Doi Ryosuke; Nishino Koji; Ikeda Shinichi

Archive | 2009

Gas supply device equipped with carburetor

Nagata Atsushi; Nagase Masaaki; Hidaka Atsushi; Hirata Kaoru; Matsumoto Atsushi; Nishino Kouji; Dohi Ryousuke; Ikeda Nobukazu

Archive | 2005

CHAMBER INTERNAL PRESSURE CONTROLLER AND INTERNAL PRESSURE CONTROLLED CHAMBER

Omi Tadahiro; Teramoto Akinobu; Uno Tomio; Doi Ryosuke; Nishino Koji; Nakamura Osamu; Matsumoto Atsushi; Nagase Masaaki; Ikeda Shinichi

Archive | 2010

Discontinuous switching flow control method of fluid using pressure type flow controller

Ohmi Tadahiro; Nishino Kouji; Dohi Ryousuke; Nagase Masaaki; Sugita Katsuyuki; Hirata Kaoru; Hirose Takashi; Shinohara Tsutomu; Ikeda Nobukazu; Yoshida Toshihide; Tanaka Hisashi

Archive | 2006

FLOW CONTROL METHOD OF CLUSTERED FLUID AND FLOW CONTROL APPARATUS FOR CLUSTERED FLUID TO BE USED THEREFOR

Omi Tadahiro; Sugiyama Kazuhiko; Mizusawa Kaneyoshi; Takahashi Eiji; Uno Tomio; Nishino Koji; Doi Ryosuke; Ikeda Shinichi; Nagase Masaaki

Archive | 2013

RAW MATERIAL VAPORIZATION SUPPLY DEVICE WITH RAW MATERIAL CONCENTRATION DETECTION MECHANISM

Nagase Masaaki; Hirata Kaoru; Hidaka Atsushi; Nishino Koji; Ikeda Shinichi; Nakamura Takeshi

Archive | 2013

Calibration method and flow-rate measurement method for flow-rate controller of gas supplying apparatus

Nagase Masaaki; Ikeda Nobukazu; Sawada Yohei; Hirai Tooru; Morisaki Kazuyuki; Nishino Kouji; Dohi Ryousuke

Archive | 2012

MATERIAL VAPORIZATION SUPPLY APPARATUS

Hidaka Atsushi; Hirata Kaoru; Nagase Masaaki; Doi Ryosuke; Nishino Koji; Ikeda Shinichi

Archive | 2012

FLOW RATE MEASURING DEVICE OF FLOW CONTROLLER FOR GAS SUPPLY DEVICE AND METHOD FOR MEASURING FLOW RATE

Sawada Yohei; Nagase Masaaki; Ikeda Nobukazu; Nishino Kouji; Dohi Ryousuke

Archive | 2012

Material vaporization supply device

Hidaka Atsushi; Hirata Kaoru; Nagase Masaaki; Dohi Ryousuke; Nishino Kouji; Ikeda Nobukazu

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Ikeda Nobukazu

University of Tokushima

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Nishino Kouji

Tohoku University

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Sawada Yohei

Tokyo Electron

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Yamaji Michio

University of Tokushima

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Deguchi Yoshihiro

University of Tokushima

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Ohmi Tadahiro

Canon Inc.

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Yakushijin Tadayuki

University of Tokushima

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Kuroda Rihito

Tohoku University

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Sugawa Shigetoshi

Canon Inc.

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Ishii Hidekazu

Tohoku University

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