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Inoue Soichi

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Publication

Featured researches published by Inoue Soichi.

Archive | 2005

METHOD FOR MANUFACTURING MASK PATTERN, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, MANUFACTURING SYSTEM OF MASK PATTERN, CELL LIBRARY, AND METHOD FOR MANUFACTURING PHOTOMASK

Kotani Toshiya; Tanaka Satoshi; Inoue Soichi

Archive | 2003

Method for correcting mask pattern for exposure, program, mask pattern forming method and method for manufacturing semiconductor device

Tanaka Satoshi; Inoue Soichi

Archive | 2004

METHOD FOR MANUFACTURING PHOTOMASK AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Nojima Shigeki; Sanhongi Shoji; Tanaka Satoshi; Kotani Toshiya; Hasebe Shigeru; Hashimoto Koji; Inoue Soichi; Ikenaga Osamu

Archive | 2002

METHOD OF CREATING DESIGN RULE, DESIGN RULE CREATING SYSTEM, AND RECORDING MEDIUM

Kotani Toshiya; Tanaka Satoshi; Inoue Soichi

Archive | 2004

METHOD AND SYSTEM FOR DECIDING AT LEAST DESIGN RULE OR PROCESS PARAMETER, AND MANUFACTURING METHOD OF SEMICONDUCTOR IC USING DECISION METHOD, AND SYSTEM FOR DECIDING AT LEAST ONE OF DESIGN RULE AND PROCESS PARAMETER

Kotani Toshiya; Tanaka Satoshi; Inoue Soichi; Mori Ichiro; Hashimoto Koji

Archive | 2002

METHOD FOR INSPECTING EXPOSURE MASK PATTERN

Tanaka Satoshi; Inoue Soichi

Archive | 2005

DEFECT INSPECTION METHOD OF PHOTOMASK, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING PHOTOMASK

Kotani Toshiya; Kiyou Suigen; Yamaguchi Shinji; Inoue Soichi

Archive | 2004

METHOD FOR CORRECTING MASK PATTERN, PROGRAM FOR CORRECTING MASK PATTERN, METHOD FOR MANUFACTURING PHOTOMASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Kotani Toshiya; Tanaka Satoshi; Nojima Shigeki; Hashimoto Koji; Inoue Soichi

Archive | 2002

PATTERN CORRECTING METHOD FOR MASK FOR EXPOSURE, PATTERN FORMING METHOD AND PROGRAM

Hashimoto Koji; Inoue Soichi; Tanaka Satoshi; Usui Satoshi

Archive | 2002

Measurement method of illuminance irregularities of aligner, correction method of illuminance irregularities, manufacturing method of semiconductor device and aligner

Inoue Soichi; Sato Kazuya; Tanaka Satoshi

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Collaboration

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Hashimoto Koji

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Kobayashi Sachiko

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Yamamoto Kazuko

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Fukuhara Kazuya

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Kotani Toshiya

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Tanaka Satoshi

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