Is this you? Create Your Porfile
Avatar

James V. Tietz

Lam Research

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where James V. Tietz is active.

Explore More

Publication

Featured researches published by James V. Tietz.

Archive | 2002

Plasma etching of silicon carbide

Si Yi Li; S. M. Reza Sadjadi; James V. Tietz

Archive | 2004

Method for plasma etching using periodic modulation of gas chemistry

Eric Hudson; James V. Tietz

Archive | 2013

Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber

Dean J. Larson; Robert C. Hefty; James V. Tietz; Williams S. Kennedy; Eric Lenz; William M. Denty; Enrico Magni

Archive | 2001

Method of plasma etching low-k dielectric materials

Si Yi Li; Helen Zhu; S. M. Reza Sadjadi; James V. Tietz; Bryan A. Helmer

Archive | 2004

Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition

Seokmin Yun; Ji Zhu; Peter Cirigliano; Sangheon Lee; Thomas S. Choi; Peter Loewenhardt; Mark Wilcoxson; Reza Sadjadi; Eric Hudson; James V. Tietz

Archive | 2007

Methods for performing actual flow verification

Iqbal Shareef; James V. Tietz; Vernon Wong; Richard J. Meinecke

Archive | 2007

Methods for performing transient flow prediction and verification using discharge coefficients

Iqbal Shareef; James V. Tietz; Vernon Wong; Richard J. Meinecke

Archive | 2010

Methods for delivering a process gas

Iqbal Shareef; James V. Tietz; Vernon Wong; Richard J. Meinecke

Archive | 2012

APPARATUS FOR DELIVERING A PROCESS GAS

Iqbal Shareef; James V. Tietz; Vermon Wong; Richard J. Meinecke

Archive | 2004

Plasmaätzverfahren mittels periodischer modulation von gaschemie

Eric Hudson; James V. Tietz

Explore More

Collaboration

Dive into the James V. Tietz's collaboration.

Top Co-Authors
Avatar

Eric Hudson

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Iqbal Shareef

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Richard J. Meinecke

Lam Research

View shared research outputs
Top Co-Authors
Avatar

S. M. Reza Sadjadi

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Si Yi Li

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Helen Zhu

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Vernon Wong

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Dean J. Larson

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Enrico Magni

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Eric Lenz

Lam Research

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge