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Naoki Yokoi

Mitsubishi

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Publication

Featured researches published by Naoki Yokoi.

Archive | 1997

Drying apparatus for processing surface of substrate

Akinori Matsumoto; Takeshi Kuroda; Cozy Ban; Toko Konishi; Naoki Yokoi

Archive | 1997

Drying apparatus and method

Akinori Matsumoto; Takeshi Kuroda; Cozy Ban; Toko Konishi; Naoki Yokoi

Archive | 1997

Drying apparatus and method using IPA of a semiconductor wafer

Akinori Matsumoto; Takeshi Kuroda; Cozy Ban; Toko Konishi; Naoki Yokoi

Archive | 2002

Method of manufacturing semiconductor device including a cleaning step, and semiconductor device manufactured thereby

Naoki Yokoi

Archive | 2002

Substrate cleaning method and method for producing an electronic device

Toshihiko Nagai; Hiroshi Tanaka; Naoki Yokoi; Yasuhiro Asaoka; Seiji Muranaka

Archive | 1998

Semiconductor wafer processing apparatus and method of controlling the same

Toko Konishi; Naoki Yokoi

Archive | 2001

Semiconductor device and method of manufacturing for the same

Yasuhiro Asaoka; Masashi Muranaka; Toshihiko Nagai; Hiroshi Tanaka; Naoki Yokoi; 誠志 村中; 直樹 横井; 俊彦 永井; 保宏 浅岡; 博司 田中

Archive | 2003

Method of cleaning a silicon substrate after blanket depositing a tungsten film by dipping in a solution of hydrofluoric acid, hydrochloric acid, and/or ammonium hydroxide

Naoki Yokoi

Archive | 2002

METHOD OF CLEANING A SILICON SUBSTRATE AFTER BLANKET DEPOSITING A TUNGSTEN FILM BY DIPPING IN A SOLUTION HAVING HYDROFLUORIC ACID, HYDROCHLORIC ACID, AND/OR AMMONIUM HYDROXIDE PRIOR TO PATTERNING THE TUNGSTEN FILM

Naoki Yokoi

Archive | 2001

Rinsing method and rinsing device for semiconductor device, and manufacturing method for the semiconductor device

Yasuhiro Asaoka; Masashi Muranaka; Toshihiko Nagai; Hiroshi Tanaka; Naoki Yokoi; 誠志 村中; 直樹 横井; 俊彦 永井; 保宏 浅岡; 博司 田中

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Collaboration

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Toko Konishi

Mitsubishi

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Akinori Matsumoto

Mitsubishi

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Cozy Ban

Mitsubishi

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Hiroshi Tanaka

Mitsubishi

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Takeshi Kuroda

Mitsubishi

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Toshihiko Nagai

Panasonic

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Yasuhiro Asaoka

Mitsubishi

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Masahiko Higashi

Mitsubishi

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Itaru Kanno

Mitsubishi

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Kazutoshi Anabuki

Mitsubishi

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