James Albert Gilhooly

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Featured researches published by James Albert Gilhooly.

Archive | 1996

Process for removing residue from a semiconductor wafer after chemical-mechanical polishing

Cuc K. Huynh; Matthew J. Rutten; Susan L. Cohen; Douglas P. Nadeau; Robert A. Jurjevic; James Albert Gilhooly

Archive | 1998

Endpoint detection by chemical reaction and reagent

Leping Li; James Albert Gilhooly; Clifford Owen Morgan; Cong Wei

Archive | 1998

Indirect endpoint detection by chemical reaction and chemiluminescence

Leping Li; James Albert Gilhooly; Clifford Owen Morgan; William J. Surovic; Cong Wei

Archive | 1999

Optimization of chemical mechanical process by detection of oxide/nitride interface using CLD system

Leping Li; James Albert Gilhooly; Clifford Owen Morgan; Cong Wei

Archive | 1998

Indirect endpoint detection by chemical reaction

Leping Li; James Albert Gilhooly; Clifford Owen Morgan; Cong Wei; Chienfan Yu

Archive | 2000

Endpoint detection by chemical reaction

Leping Li; James Albert Gilhooly; Clifford Owen Morgan; Cong Wei; Chienfan Yu

Archive | 1999

Optimization of CMP process by detecting of oxide/nitride interface using IR system

Leping Li; James Albert Gilhooly; Clifford Owen Morgan; Cong Wei

Archive | 1998

Probe for slurry gas sampling

Leping Li; James Albert Gilhooly; Clifford Owen Morgan; Cong Wei; Werner Moser; Matthias Kutter; Joseph Knee; Walter Imfeld; Bruno Greuter; Heinz Stuenzi

Archive | 1998

Chemiluminescence detection apparatus

Leping Li; James Albert Gilhooly; Clifford Owen Morgan; Cong Wei; Werner Moser; Matthias Kutter; Joseph Knee; Walter Imfeld; Bruno Greuter; Heinz Stuenzi

Archive | 2002