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Clifford Owen Morgan

IBM

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Publication

Featured researches published by Clifford Owen Morgan.

Archive | 1997

Polishing pad with controlled release of desired micro-encapsulated polishing agents

Matthew Kilpatrick Miller; Clifford Owen Morgan; Matthew J. Rutten; Erick G. Walton; Terrance M. Wright

Archive | 1995

Chemical-mechanical polishing apparatus with slurry removal system and method

Clifford Owen Morgan; Dennis Arthur Schmidt; Philip Theodoseau

Archive | 1999

Method and apparatus for slurry polishing

Clifford Owen Morgan; Matthew J. Rutten; Erick G. Walton; Terrance M. Wright

Archive | 1998

Endpoint detection by chemical reaction and reagent

Leping Li; James Albert Gilhooly; Clifford Owen Morgan; Cong Wei

Archive | 1998

Chemical mechanical polishing of multiple material substrates and slurry having improved selectivity

Donald F. Canaperi; Rangarajan Jagannathan; Mahadevaiyer Krishnan; Clifford Owen Morgan; Terrance M. Wright

Archive | 1998

Indirect endpoint detection by chemical reaction and chemiluminescence

Leping Li; James Albert Gilhooly; Clifford Owen Morgan; William J. Surovic; Cong Wei

Archive | 1999

Optimization of chemical mechanical process by detection of oxide/nitride interface using CLD system

Leping Li; James Albert Gilhooly; Clifford Owen Morgan; Cong Wei

Archive | 1998

Indirect endpoint detection by chemical reaction

Leping Li; James Albert Gilhooly; Clifford Owen Morgan; Cong Wei; Chienfan Yu

Archive | 2000

Endpoint detection by chemical reaction

Leping Li; James Albert Gilhooly; Clifford Owen Morgan; Cong Wei; Chienfan Yu

Archive | 1999

Optimization of CMP process by detecting of oxide/nitride interface using IR system

Leping Li; James Albert Gilhooly; Clifford Owen Morgan; Cong Wei

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Cong Wei

IBM

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James Albert Gilhooly

IBM

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Leping Li

Wesleyan University

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Terrance M. Wright

IBM

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Bruno Greuter

IBM

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Chienfan Yu

IBM

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Erick G. Walton

IBM

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Heinz Stuenzi

IBM

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Joseph Knee

IBM

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Matthew J. Rutten

IBM

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