James Buff
Varian Semiconductor
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Publication
Featured researches published by James Buff.
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) | 2000
Svetlana Radovanov; Reuel B. Liebert; Phil Corey; James Cummings; Gordon Angel; James Buff
We discuss measurements and modeling associated with the high current ion beam space charge neutralization. We show the importance of the electron temperature in maintaining low beam potential and induced voltage on implanted wafers.
Archive | 2005
Vikram Singh; James Buff; Rajesh Dorai
Archive | 2004
Reuel B. Liebert; Harold Persing; James Buff
Archive | 2006
Svetlana Radovanov; Peter L. Kellerman; Victor M. Benveniste; Robert C. Lindberg; Kenneth H. Purser; Tyler Rockwell; James Buff; Anthony Renau
Archive | 2006
Anthony Renau; James Buff; Svetlana Radovanov
Archive | 2005
Anthony Renau; Donna L. Smatlak; James Buff; Eric Hermanson
Archive | 2009
Victor M. Benveniste; James Buff; Frank Sinclair; Joseph C. Olson
Archive | 2007
Kenneth H. Purser; James Buff; Victor M. Benveniste
Archive | 2010
Frank Sinclair; Victor M. Benveniste; Svetlana Radovanov; James Buff
Archive | 2010
James Buff; Svetlana Radovanov; Bon-Woong Koo; Wilhelm P. Platow; Frank Sinclair; D. Jeffrey Lischer; Craig R. Chaney; Steven C. Borichevsky; Eric R. Cobb; Mayur Jagtap; Kenneth H. Purser; Victor M. Benveniste; Shardul Patel
