Craig R. Chaney
Varian Semiconductor
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Craig R. Chaney.
2016 21st International Conference on Ion Implantation Technology (IIT) | 2016
Antonella Cucchetti; Alexander S. Perel; Craig R. Chaney; David Sporleder; Wayne LeBlanc; Morgan McCarty; Bob Lindberg
Increasing ion source life and output remains a key challenge to improving the productivity and cost of ownership of ion implant tools. This paper describes how recent developments in source design, materials selection, and operation, combined with the careful optimization of gas chemistries, have improved source performance, particularly for dedicated species operation.
Archive | 2007
Alexander S. Perel; Craig R. Chaney
Archive | 2013
Bon-Woong Koo; Victor M. Benveniste; Christopher A. Rowland; Craig R. Chaney; Frank Sinclair; Neil J. Bassom
Archive | 2006
Craig R. Chaney; Russell J. Low; Jonathan Gerald England
Archive | 2008
John Koo; David J. Twiss; Chris Campbell; Frank Sinclair; Alexander S. Perel; Craig R. Chaney; Wilhelm P. Platow; Eric R. Cobb
Archive | 2009
Bon-Woong Koo; Christopher R. Campbell; Craig R. Chaney; Robert C. Lindberg; Wilhelm P. Platow; Alexander S. Perel
Archive | 2010
Wilhelm P. Platow; Neil J. Bassom; Peter F. Kurunczi; Alexander S. Perel; Craig R. Chaney
Archive | 2009
Costel Biloiu; Craig R. Chaney; Eric R. Cobb; Bon-Woong Koo; Wilhelm P. Platow
Archive | 2008
Russell J. Low; Jay T. Scheuer; Alexander S. Perel; Craig R. Chaney; Neil J. Bassom
Archive | 2006
Eric R. Cobb; Russell J. Low; Craig R. Chaney; Leo V. Klos
