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James E. Willis

Tokyo Electron

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Publication

Featured researches published by James E. Willis.

Archive | 2005

Fault detection and classification (FDC) using a run-to-run controller

James E. Willis; Merritt Funk; Kevin Lally; Kevin Augustine Pinto; Masayuki Tomoyasu; Raymond Peterson; Radha Sundararajan

Archive | 2004

Method for automatic configuration of processing system

Satoshi Harada; Edward C. Hume; James E. Willis; Kevin Andrew Chamness; Hieu A. Lam; Hongyu Yue; David Fatke

Archive | 2003

Method and system for data handling, storage and manipulation

James E. Willis

Archive | 2004

Method for data pre-population

James E. Willis; Satoshi Harada; Edward C. Hume; James E. Klekotka

Archive | 2005

R2R controller to automate the data collection during a DOE

James E. Willis

Archive | 2006

Creating an optically tunable anti-reflective coating

James E. Willis; James E. Klekotka

Archive | 2006

METHODS AND APPARATUS FOR USING AN OPTICALLY TUNABLE SOFT MASK TO CREATE A PROFILE LIBRARY

James E. Willis; James E. Klekotka

Archive | 2006

Methods and apparatus for changing the optical properties of resists

James E. Willis; Manuel Perez; Asao Yamashita

Archive | 2006

METHODS AND APPARATUS FOR USING AN OPTICALLY TUNABLE SOFT MASK PROFILE LIBRARY

James E. Willis; James E. Klekotka

Archive | 2006

accuracy of optical metrology measurements

James E. Willis; James E. Klekotka

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James E. Klekotka

Tokyo Electron

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Asao Yamashita

Tokyo Electron

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Edward C. Hume

Tokyo Electron

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Manuel Perez

Tokyo Electron

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Satoshi Harada

Tokyo Electron

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David Fatke

Tokyo Electron

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Hieu A. Lam

Tokyo Electron

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Hongyu Yue

Tokyo Electron

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Kevin Andrew Chamness

Tokyo Electron

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Kevin Augustine Pinto

Tokyo Electron

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