Jan Horn | Researchain

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Featured researches published by Jan Horn.

Archive | 2014

Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus

Stefan Xalter; Yim-Bun Patrick Kwan; András G. Major; Manfred Maul; Johannes Eisenmenger; Damian Fiolka; Jan Horn; Markus Deguenther; Florian Bach; Michael Patra; Johannes Wangler; Michael Layh

Archive | 2010

Monitoring von kippbaren Spiegeln

Jan Horn; András G. Major

Archive | 2011

Methods and devices for driving micromirrors

Jan Horn; Christian Kempter

Archive | 2010

Monitoring of tiltable mirrors

Jan Horn; András G. Major; Christian Kempter; Ulrich Bihr

Archive | 2008

Verfahren und Vorrichtungen zur Ansteuerung von Mikrospiegeln

Jan Horn; Christian Kempter

Archive | 2015

Vorrichtung und verfahren zur regelung der positionierung einer vielzahl von verstellbaren spiegel-elementen einer vielspiegel-anordnung

Jan Horn; Markus Holz; Jörg Specht; Johannes Eisenmenger; Stefan Krone

Archive | 2013

Method and component for regulating the tilting of a mirror element

Jan Horn; Lars Berger; Matthias Hartmann; Benedikt Knauf; Matthias Orth; Severin Waldis

Archive | 2013

Device and method for controlling the positioning of a movable single mirror

Jan Horn

Archive | 2015

Method for regulating the tilting of a mirror element

Jan Horn; Lars Berger; Matthias Hartmann; Benedikt Knauf; Matthias Orth; Severin Waldis

Archive | 2008

Regulator for regulating a flat assembly of individually drivable beam deviation elements in a microlithographic projection exposure system

Stefan Xalter; Yim-Bun-Patrick Kwan; András G. Major; Manfred Maul; Johannes Eisenmenger; Damian Fiolka; Jan Horn; Markus Degünther; Florian Bach; Michael Patra; Johannes Wangler; Michael Layh

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