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Florian Bach

Carl Zeiss AG

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Publication

Featured researches published by Florian Bach.

Archive | 2010

FACET MIRROR FOR USE IN A PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY

Udo Dinger; Martin Endres; Armin Werber; Norbert Muehlberger; Florian Bach

Archive | 2014

Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus

Stefan Xalter; Yim-Bun Patrick Kwan; András G. Major; Manfred Maul; Johannes Eisenmenger; Damian Fiolka; Jan Horn; Markus Deguenther; Florian Bach; Michael Patra; Johannes Wangler; Michael Layh

Archive | 2008

Method and Device for Controlling a Plurality of Actuators and an Illumination Device for Lithography

Thomas Rohe; Juergen Fischer; Florian Bach

Archive | 2012

Anordnung zur Halterung eines optischen Elementes, insbesondere in einer EUV-Projektionsbelichtungsanlage

Michael Erath; Florian Bach; Ulrich Schönhoff; Rodolfo Rabe; Norbert Mühlberger; Dirk Eicher; Jasper Wesselingh

Archive | 2011

Individual mirror for constructing a faceted mirror, in particular for use in a projection exposure system for microlithography

Armin Werber; Norbert Muehlberger; Florian Bach

Archive | 2013

ARRANGEMENT FOR MOUNTING AN OPTICAL ELEMENT

Michael Erath; Florian Bach; Ulrich Schoenhoff; Rodolfo Rabe; Norbert Muehlberger; Dirk Eicher; Jasper Wesselingh

Archive | 2010

Mikrospiegelarray mit Doppelbiegebalken Anordnung und elektronischer Aktorik

Armin Werber; Norbert Mühlberger; Florian Bach

Archive | 2008

Method and apparatus for controlling a plurality of actuators of a projection exposure apparatus for microlithography

Thomas Rohe; Jürgen Fischer; Florian Bach

Archive | 2014

Illumination system of a microlithographic projection exposure apparatus having a temperature control device

Florian Bach; Daniel Benz; Severin Waldis; Armin Werber; Berndt Warm

Archive | 2010

MIRROR FOR GUIDING A RADIATION BUNDLE

Severin Waldis; Florian Bach; Daniel Benz; Armin Werber; Wilfried Noell; Dirk Heinrich Ehm; Stefan Wiesner; Dieter Kraus

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Collaboration

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Armin Werber

Carl Zeiss AG

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Norbert Mühlberger

Carl Zeiss AG

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Daniel Benz

Carl Zeiss AG

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Severin Waldis

Carl Zeiss AG

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Thomas Rohe

Carl Zeiss AG

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Yim-Bun-Patrick Kwan

Carl Zeiss AG

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András G. Major

Carl Zeiss AG

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Damian Fiolka

Carl Zeiss AG

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Jan Horn

Carl Zeiss AG

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Johannes Eisenmenger

Carl Zeiss AG

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