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Joel M. Cook

Lam Research

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Publication

Featured researches published by Joel M. Cook.

Archive | 1996

Temperature controlling method and apparatus for a plasma processing chamber

Thomas E. Wicker; Joel M. Cook; Robert A. Maraschin; William S. Kennedy; Neil Benjamin

Archive | 1996

Methods and apparatus for etching self-aligned contacts

Janet M. Flanner; Prashant Gadgil; Linda N. Marquez; Adrian Doe; Joel M. Cook

Archive | 1998

Self-aligned contacts for semiconductor device

Janet M. Flanner; Linda N. Marquez; Joel M. Cook; Ian J. Morey

Archive | 1998

Method for igniting a plasma inside a plasma processing reactor

Thomas E. Wicker; Joel M. Cook; Jian J. Chen

Archive | 2004

System, method and apparatus for improved global dual-damascene planarization

Shrikant P. Lohokare; Andrew D. Bailey; David Hemker; Joel M. Cook

Archive | 1999

Apparatus for reducing polymer deposition on substrate support

William S. Kennedy; Thomas E. Wicker; Robert A. Maraschin; Joel M. Cook; Alan M. Schoepp

Archive | 2004

System, method and apparatus for improved local dual-damascene planarization

Shrikant P. Lohokare; Andrew D. Bailey; David Hemker; Joel M. Cook

Archive | 2008

Method for electroless depositing a material on a surface of a wafer

Yezdi Dordi; John M. Boyd; William Thie; Bob Maraschin; Fred C. Redeker; Joel M. Cook

Archive | 2004

Processes for treating morphologically-modified silicon electrode surfaces using gas-phase interhalogens

Joel M. Cook

Archive | 2004

System, verfahren und vorrichtung zur verbesserten globalen doppel-damascene-planarisierung

Andrew D. Bailey; Joel M. Cook; David Hemker; Shrikant P. Lohokare

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Collaboration

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Thomas E. Wicker

Lam Research

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Andrew D. Bailey

Lam Research

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David Hemker

Lam Research

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Robert A. Maraschin

Lam Research

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Shrikant P. Lohokare

Lam Research

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William S. Kennedy

Lam Research

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Alan M. Schoepp

Lam Research

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Bob Maraschin

Lam Research

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Fred C. Redeker

Lam Research

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Janet M. Flanner

Lam Research

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