Jason B. Elledge | Researchain

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Publication

Featured researches published by Jason B. Elledge.

Archive | 2000

Apparatus for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies and methods for making and using same

Jason B. Elledge

Archive | 2001

Method and apparatus for supporting and cleaning a polishing pad for chemical-mechanical planarization of microelectronic substrates

Jason B. Elledge

Archive | 2003

Anodically-bonded elements for flat panel displays

James J. Hofmann; Jason B. Elledge; Zhongyi Xia; David A. Cathey

Archive | 2004

Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpieces

Jason B. Elledge

Archive | 2007

In-situ chemical-mechanical planarization pad metrology using ultrasonic imaging

Jason B. Elledge

Archive | 2004

Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces

Jason B. Elledge; Nagasubramaniyan Chandrasekaran

Archive | 1998

Method for forming spacers in flat panel displays using photo-etching

Jason B. Elledge

Archive | 2001

Fiber spacers in large area vacuum displays and method for manufacture

James J. Hofmann; Jason B. Elledge

Archive | 2004

Methods and systems for planarizing workpieces, e.g., microelectronic workpieces

Jason B. Elledge

Archive | 2003

POLISHING MACHINES INCLUDING UNDER-PADS AND METHODS FOR MECHANICAL AND/OR CHEMICAL-MECHANICAL POLISHING OF MICROFEATURE WORKPIECES

Jason B. Elledge

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Collaboration

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James J. Hofmann

Micron Technology

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Charles M. Watkins

Micron Technology

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David A. Cathey

Micron Technology

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Nagasubramaniyan Chandrasekaran

Micron Technology

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Zhongyi Xia

Micron Technology

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