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Jean Wang

TSMC

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Publication

Featured researches published by Jean Wang.

Archive | 2006

Adjustable electrodes and coils for plasma density distribution control

Ying-Lin Chen; Chi-An Kao; Po-Zen Chen; Yi-Li Hsiao; Chen-Hua Yu; Jean Wang; Lawrance Sheu

Archive | 2007

SUBSTRATE CARRIER, PORT APPARATUS AND FACILITY INTERFACE AND APPARATUS INCLUDING SAME

Yi-Li Hsiao; Chen-Hua Yu; Jean Wang; Fu-Kang Tien; Jui-Pin Hung

Archive | 2006

Gas distribution apparatuses and methods for controlling gas distribution apparatuses

Yi-Li Hsiao; Chen-Hua Yu; Jean Wang; Lawrance Sheu

Archive | 2005

Systems and methods for temperature control of semiconductor wafers

Yi-Li Hsiao; Tse-Yi Chen; Jerry Hwang; Chin-Hsin Peng; Jean Wang; Chen-Hua Yu

Archive | 2007

Apparatus for storing substrates

Yi-Li Hsiao; Chen-Hua Yu; Jean Wang; Jui-Pin Hung; Ming-Shih Yeh

Archive | 2006

PVD target with end of service life detection capability

Yi-Li Hsiao; Chen-Hua Yu; Jean Wang; Lawrance Sheu

Archive | 2006

Method of using a target having end of service life detection capability

Yi-Li Hsiao; Chen-Hua Yu; Jean Wang; Lawrance Sheu

Archive | 2012

Device with adjustable electrode and method for adjusting adjustable electrode

Jean Wang; Chi-An Kao; Ying-Lin Chen; Po-Zen Chen; Yi-Li Hsiao; Chen-Hua Yu; Lawrance Sheu

Archive | 2006

ADJUSTABLE ANODE ASSEMBLY FOR A SUBSTRATE WET PROCESSING APPARATUS

Yi-Li Hsiao; Chen-Hua Yu; Jean Wang; Lawrance Sheu

Archive | 2009

System and method of detecting life of consumed material thick plate used for processing machine

Jean Wang; Lawrance Sheu

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Collaboration

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Chen-Hua Yu

TSMC

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Yi-Li Hsiao

TSMC

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Lawrance Sheu

TSMC

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Chi-An Kao

TSMC

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Jui-Pin Hung

TSMC

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Po-Zen Chen

TSMC

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Ying-Lin Chen

TSMC

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Chin-Hsin Peng

TSMC

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Fu-Kang Tien

TSMC

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Jerry Hwang

TSMC

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