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Yi-Li Hsiao

TSMC

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Publication

Featured researches published by Yi-Li Hsiao.

Archive | 2006

Adjustable electrodes and coils for plasma density distribution control

Ying-Lin Chen; Chi-An Kao; Po-Zen Chen; Yi-Li Hsiao; Chen-Hua Yu; Jean Wang; Lawrance Sheu

Archive | 2011

Substrate Assembly Carrier Using Electrostatic Force

Yi-Li Hsiao; Chen-Hua Yu; Chung-Shi Liu; Chien Ling Hwang; Ying-Jui Huang

Archive | 2007

SUBSTRATE CARRIER, PORT APPARATUS AND FACILITY INTERFACE AND APPARATUS INCLUDING SAME

Yi-Li Hsiao; Chen-Hua Yu; Jean Wang; Fu-Kang Tien; Jui-Pin Hung

Archive | 2006

Gas distribution apparatuses and methods for controlling gas distribution apparatuses

Yi-Li Hsiao; Chen-Hua Yu; Jean Wang; Lawrance Sheu

Archive | 2005

Systems and methods for temperature control of semiconductor wafers

Yi-Li Hsiao; Tse-Yi Chen; Jerry Hwang; Chin-Hsin Peng; Jean Wang; Chen-Hua Yu

Archive | 2012

Methods for stud bump formation and apparatus for performing the same

Yeong-Jyh Lin; Hsin-Hung Liao; Chien Ling Hwang; Yi-Li Hsiao; Chung-Shi Liu; Mirng-Ji Lii; Chen-Hua Yu

Archive | 2009

NOVEL WAFER'S AMBIANCE CONTROL

Yi-Li Hsiao; Chen-Hua Yu; Jean Wang; Ming-Che Ho; Chien-Ling Hwang; Jui-Pin Hung

Archive | 2007

Apparatus for storing substrates

Yi-Li Hsiao; Chen-Hua Yu; Jean Wang; Jui-Pin Hung; Ming-Shih Yeh

Archive | 2006

PVD target with end of service life detection capability

Yi-Li Hsiao; Chen-Hua Yu; Jean Wang; Lawrance Sheu

Archive | 2013

Pick-and-Place Tool for Packaging Process

Chien Ling Hwang; Ying-Jui Huang; Yi-Li Hsiao

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Chen-Hua Yu

TSMC

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Chien Ling Hwang

TSMC

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Jean Wang

TSMC

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Chung-Shi Liu

TSMC

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Lawrance Sheu

TSMC

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Mirng-Ji Lii

TSMC

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Yeong-Jyh Lin

TSMC

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Jui-Pin Hung

TSMC

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Ming-Da Cheng

TSMC

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Tsai-Tsung Tsai

TSMC

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