Jian J. Chen

Multiple coil antenna for inductively-coupled plasma generation systems

Inductive plasma processor including current sensor for plasma excitation coil

Parallel-antenna transformer-coupled plasma generation system

Inductive plasma processor method

Inductive plasma processor having coil with plural windings and method of controlling plasma density

Method for igniting a plasma inside a plasma processing reactor

Stacked RF excitation coil for inductive plasma processor

Bobine d'excitation rf a superposition pour processeur plasma inductif

Processeur inductif au plasma pourvu d'une bobine a plusieurs enroulements et procede de regulation de la densite de plasma

Mehrspulenantenne für induktivgekoppelde plasmaerzeugungsanlage More coil antenna for induktivgekoppelde plasma generation plant