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Jian J. Chen

Lam Research

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Publication

Featured researches published by Jian J. Chen.

Archive | 1998

Multiple coil antenna for inductively-coupled plasma generation systems

Jian J. Chen; Robert G. Veltrop; Thomas E. Wicker

Archive | 2001

Inductive plasma processor including current sensor for plasma excitation coil

Robert G. Veltrop; Jian J. Chen; Thomas E. Wicker

Archive | 1998

Parallel-antenna transformer-coupled plasma generation system

Jian J. Chen; Robert G. Veltrop; Thomas E. Wicker

Archive | 2003

Inductive plasma processor method

Jian J. Chen; Robert G. Veltrop; Thomas E. Wicker

Archive | 2002

Inductive plasma processor having coil with plural windings and method of controlling plasma density

Jian J. Chen; Robert G. Veltrop; Thomas E. Wicker

Archive | 1998

Method for igniting a plasma inside a plasma processing reactor

Thomas E. Wicker; Joel M. Cook; Jian J. Chen

Archive | 2001

Stacked RF excitation coil for inductive plasma processor

Jian J. Chen; Robert G. Veltrop; Thomas E. Wicker

Archive | 2002

Bobine d'excitation rf a superposition pour processeur plasma inductif

Jian J. Chen; Robert G. Veltrop; Thomas E. Wicker

Archive | 2002

Processeur inductif au plasma pourvu d'une bobine a plusieurs enroulements et procede de regulation de la densite de plasma

Jian J. Chen; Robert G. Veltrop; Thomas E. Wicker

Archive | 1999

Mehrspulenantenne für induktivgekoppelde plasmaerzeugungsanlage More coil antenna for induktivgekoppelde plasma generation plant

Jian J. Chen; Robert G. Veltrop; Thomas E. Wicker

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Thomas E. Wicker

Lam Research

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Robert G. Veltrop

Lam Research

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Joel M. Cook

Lam Research

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