Thomas E. Wicker

Low contamination high density plasma etch chambers and methods for making the same

Multiple coil antenna for inductively-coupled plasma generation systems

Temperature controlling method and apparatus for a plasma processing chamber

Semiconductor processing equipment having radiant heated ceramic liner

Particle controlling method and apparatus for a plasma processing chamber

Inductive plasma processor including current sensor for plasma excitation coil

Semiconductor processing equipment having improved process drift control

Parallel-antenna transformer-coupled plasma generation system

Contamination controlling method and apparatus for a plasma processing chamber

Inductive plasma processor method