Jin-Wook Seo

P‐35: The Effects of NiSi2 Seed Control on SGS Crystallization and TFT Characteristics

To improve TFT characteristics and reduce leakage current, we have investigated the precise control of NiSi2 seed shapes in a process called super grain silicon (SGS) crystallization. Excessive leakage current was reduced by the control of Ni in Si below ∼1013 atoms/cm2. Relatively higher SGS crystallinity of about 94% was obtained by inducing (111) NiSi2 seed to form a disc shape rather than that from a pyramid shaped seed with about 92%, resulting in more uniform TFT characteristics. Based on this seed control method, we fabricated a 14″ AMOLED TV having a pixel-to-pixel brightness uniformity of about 92%, which we believe is suitable for product acceptance.

P‐21: Investigation of Pattern‐Induced Brightness Non‐Uniformity in AMOLED Displays

We found that pattern-induced line type brightness non-uniformity is related to moire patterns that appear when primary grain boundaries in SLS processed poly-Si are aligned over repetitive TFT patterns such as metal lines. We propose a method to diminish the Moire pattern type non-uniformity by adopting black matrix and top emission TFT structure.

P‐19: Development of Microcrystalline Si for TFT Backplanes

A new composite material based on directly deposited microcrystalline Si (μc-Si) was developed, tested and applied as active layer in top-gate coplanar p-type TFTs. The obtained TFTs characteristics demonstrate high quality of developed μc-Si and possibility of using it in TFT backplanes for AMOLED displays.