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Jingbin Feng

IBM

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Publication

Featured researches published by Jingbin Feng.

Archive | 1998

Electric potential shaping apparatus for holding a semiconductor wafer during electroplating

Robert J. Contolini; Jonathan D. Reid; Evan E. Patton; Jingbin Feng; Steve Taatjes; John O. Dukovic

Archive | 1997

Electric potential shaping method for electroplating

Robert J. Contolini; Jonathan D. Reid; Evan E. Patton; Jingbin Feng; Steve Taatjes; John O. Dukovic

Archive | 2003

Wafer chuck for use in edge bevel removal of copper from silicon wafers

Steven T. Mayer; Steve Taatjes; Andy McCutcheon; Jim Schall; Jingbin Feng

Archive | 2008

Electroplating Apparatus with Vented Electrolyte Manifold

Jingbin Feng; Zhian He; Robert Rash; Steven T. Mayer

Archive | 2012

Plating method and apparatus with multiple internally irrigated chambers

Steven T. Mayer; Shantinath Ghongadi; Kousik Ganesan; Zhian He; Jingbin Feng

Archive | 2013

ELECTROFILL VACUUM PLATING CELL

R. Marshall Stowell; Jingbin Feng; David W. Porter

Archive | 2005

Small-volume electroless plating cell

Jingbin Feng; Steven T. Mayer; Daniel Mark Dinneen; Edmund B. Minshall; Christopher M. Bartlett; Eric G. Webb; R. Marshall Stowell; Mark T. Winslow; Avishai Kepten; Norman D. Kaplan; Richard K. Lyons; John B. Alexy

Archive | 2012

Plating cup with contoured cup bottom

Zhian He; Jingbin Feng; Shantinath Ghongadi; Frederick Dean Wilmot

Archive | 2012

Lipseals and contact elements for semiconductor electroplating apparatuses

Jingbin Feng; Marshall Stowell; Frederick D. Wilmot

Archive | 2010

FRONT REFERENCED ANODE

Jingbin Feng; R. Marshall Stowell; Shantinath Ghongadi; Zhian He; Frederick Dean Wilmot

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Collaboration

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Steven T. Mayer

Lawrence Livermore National Laboratory

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Zhian He

Lam Research

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Jonathan D. Reid

IBM

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Steve Taatjes

IBM

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Shantinath Ghongadi

Lam Research

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Evan E. Patton

IBM

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John O. Dukovic

IBM

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Robert J. Contolini

IBM

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Christopher M. Bartlett

Lam Research

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Richard K. Lyons

Lam Research

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