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Jingchun Zhang

Applied Materials

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Publication

Featured researches published by Jingchun Zhang.

Archive | 2012

Selective etch of silicon by way of metastable hydrogen termination

Anchuan Wang; Jingchun Zhang; Nitin K. Ingle; Young S. Lee

Archive | 2012

Selective suppression of dry-etch rate of materials containing both silicon and oxygen

Yunyu Wang; Anchuan Wang; Jingchun Zhang; Nitin K. Ingle; Young S. Lee

Archive | 2013

Dry-etch for silicon-and-nitrogen-containing films

Yunyu Wang; Anchuan Wang; Jingchun Zhang; Nitin K. Ingle; Young S. Lee

Archive | 2011

Remotely-excited fluorine and water vapor etch

Jingchun Zhang; Anchuan Wang; Nitin K. Ingle

Archive | 2012

Methods for etch of sin films

Jingchun Zhang; Anchuan Wang; Nitin K. Ingle

Archive | 2011

Selective etch for silicon films

Jingchun Zhang; Anchuan Wang; Nitin K. Ingle

Archive | 2014

Dry-etch for silicon-and-carbon-containing films

Jingchun Zhang; Anchuan Wang; Nitin K. Ingle; Yunyu Wang; Young Lee

Archive | 2012

Methods for etch of metal and metal-oxide films

Jingchun Zhang; Anchuan Wang; Nitin K. Ingle

Archive | 2013

Differential silicon oxide etch

Seung Park; Yunyu Wang; Jingchun Zhang; Anchuan Wang; Nitin K. Ingle

Archive | 2013

DRY ETCH PROCESS

Jingchun Zhang; Nitin K. Ingle; Anchuan Wang

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Collaboration

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Anchuan Wang

Applied Materials

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Nitin K. Ingle

Applied Materials

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Young S. Lee

Applied Materials

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Zhijun Chen

Applied Materials

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Seung Park

Applied Materials

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Yunyu Wang

Applied Materials

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Ching-Mei Hsu

Applied Materials

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Jie Liu

Applied Materials

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Mikhail Korolik

Applied Materials

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Young Lee

Applied Materials

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