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Anchuan Wang

Applied Materials

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Publication

Featured researches published by Anchuan Wang.

Archive | 2004

Hydrogen assisted hdp-cvd deposition process for aggressive gap-fill technology

Bikram Kapoor; M. Ziaul Karim; Anchuan Wang

Archive | 2009

Gapfill improvement with low etch rate dielectric liners

Young Soo Kwon; Bi Jang; Anchuan Wang; Young S. Lee; Mihaela Balseanu; Li-Qun Xia; Jin Ho Jeon

Archive | 2003

HDP-CVD multistep gapfill process

M. Ziaul Karim; Bikram Kapoor; Anchuan Wang; Dongqing Li; Katsunari Ozeki; Manoj Vellaikal; Zhuang Li

Archive | 2003

Reactive ion etching for semiconductor device feature topography modification

Hemant P. Mungekar; Anjana M. Patel; Manoj Vellaikal; Anchuan Wang; Bikram Kapoor

Archive | 2007

Low wet etch rate silicon nitride film

Hemant P. Mungekar; Jing Wu; Young S. Lee; Anchuan Wang

Archive | 2008

Reduction of etch-rate drift in HDP processes

Anchuan Wang; Young S. Lee; Manoj Vellaikal; Jason Thomas Bloking; Jin Ho Jeon; Hemant P. Mungekar

Archive | 2008

High density plasma gapfill deposition-etch-deposition process using fluorocarbon etchant

Young S. Lee; Ying Rui; Dmitry Lubomirsky; Daniel J. Hoffman; Jang Gyoo Yang; Anchuan Wang

Archive | 2008

Impurity control in HDP-CVD DEP/ETCH/DEP processes

Anchuan Wang; Young S. Lee; Manoj Vellaikal; Jason Thomas Bloking; Jin Ho Jeon; Hemant P. Mungekar

Archive | 2003

HDP-CVD uniformity control

Padmanabhan Krishnaraj; Bruno Geoffrion; Michael S. Cox; Lin Zhang; Bikram Kapoor; Anchuan Wang; Zhenjiang Cui

Archive | 2008

GAPFILL EXTENSION OF HDP-CVD INTEGRATED PROCESS MODULATION SIO2 PROCESS

Anchuan Wang; Young S. Lee; Manoj Vellaikal; Jason Thomas Bloking; Jin Ho Jeon; Hemant P. Mungekar

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Young S. Lee

Applied Materials

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Hemant P. Mungekar

Applied Materials

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Manoj Vellaikal

Applied Materials

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Bikram Kapoor

Applied Materials

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Jin Ho Jeon

Applied Materials

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Jason Thomas Bloking

Applied Materials

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Daniel J. Hoffman

Applied Materials

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Dmitry Lubomirsky

Applied Materials

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Jang Gyoo Yang

Applied Materials

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Li-Qun Xia

Applied Materials

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