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Nitin K. Ingle

Applied Materials

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Publication

Featured researches published by Nitin K. Ingle.

Archive | 2007

Chemical vapor deposition of high quality flow-like silicon dioxide using a silicon containing precursor and atomic oxygen

Nitin K. Ingle; Zheng Yuan; Paul Edward Gee; Kedar Sapre

Archive | 2011

Apparatus and methods for cyclical oxidation and etching

Udayan Ganguly; Joseph M. Ranish; Aaron Muir Hunter; Jing Tang; Christopher S. Olsen; Matthew D. Scotney-Castle; Vicky Nguyen; Swaminathan Srinivasan; Johanes F. Swenberg; Anchuan Wang; Nitin K. Ingle; Manish Hemkar; Jose Antonio Marin

Archive | 2007

Methods of thin film process

Nitin K. Ingle; Jing Tang; Yi Zheng; Zheng Yuan; Zhenbin Ge; Xinliang Lu; Chien-Teh Kao; Vikash Banthia; William H. McClintock; Mei Chang

Archive | 2005

gap-fill depositions introducing hydroxyl-containing precursors in the formation of silicon containing dielectric materials

Nitin K. Ingle; Shan Wong; Xinyun Xia; Vikash Banthia; Won B. Bang; Yen-Kun Victor Wang

Archive | 2009

Smooth siconi etch for silicon-containing films

Jing Tang; Nitin K. Ingle; Dongqing Yang

Archive | 2009

Stress management for tensile films

Jingmei Liang; Anjana M. Patel; Nitin K. Ingle; Shankar Venkataraman

Archive | 2010

Post-planarization densification

Jingmei Liang; Nitin K. Ingle; Shankar Venkataraman

Archive | 2002

Gas distribution showerhead

Karthik Janakiraman; Nitin K. Ingle; Zheng Yuan; Steven Gianoulakis

Archive | 2009

Wet oxidation process performed on a dielectric material formed from a flowable cvd process

Linlin Wang; Abhijit Basu Mallick; Nitin K. Ingle

Archive | 2012

Selective etch of silicon by way of metastable hydrogen termination

Anchuan Wang; Jingchun Zhang; Nitin K. Ingle; Young S. Lee

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Anchuan Wang

Applied Materials

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Abhijit Basu Mallick

Applied Materials

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Shankar Venkataraman

Applied Materials

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Jingmei Liang

Applied Materials

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Jingchun Zhang

Applied Materials

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Xikun Wang

Applied Materials

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Zheng Yuan

ASML Holding

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Zhijun Chen

Applied Materials

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Jing Tang

Applied Materials

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Vinod R. Purayath

Applied Materials

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