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Jinyuan Chen

Georgetown University

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Publication

Featured researches published by Jinyuan Chen.

Archive | 2007

Multi-station decoupled reactive ion etch chamber

Gerald Yin; Tuqiang Ni; Jinyuan Chen; Xueyu Qian

Archive | 2007

High frequency power supply device and high frequency power supplying method

Eiich Hayano; Takeshi Pearl Kogyo Co. Ltd. Nakamura; Yasunori Pearl Kogyo Co. Ltd. Maekawa; Hiroshi Iizuka; Jinyuan Chen

Archive | 2007

Multiple frequency plasma chamber, switchable rf system, and processes using same

Jinyuan Chen; Gerald Yin; Xueyu Qian; Tuqiang Ni; Hiroshi Iizuka

Archive | 2007

Decoupling reactive ion etching chamber containing multiple processing platforms

Zhiyao Yin; Tuqiang Ni; Jinyuan Chen; Xueyu Qian

Archive | 2007

Multi-station plasma reactor with multiple plasma regions

Aihua Chen; Yijun Liu; Jinyuan Chen; Lee Luo; Tuqiang Ni; Gerald Yin; Henry Ho

Archive | 2009

Capacitive cvd reactor and methods for plasma cvd process

Gerald Yin; Jinyuan Chen; Tuqiang Ni

Archive | 2008

Rf power source system, and plasma chamber using the rf power source system

Jinyuan Chen; Hiroshi Iizuka; Shigyo In; Tuqiang Ni; Xue-Yu Qian; 倪圖強; 尹志堯; 錢學▲よ▼; 陳金元; 飯塚浩

Archive | 2010

Plasma confinement device and plasma treatment device utilizing the same

Jinyuan Chen; Zhiyou Du; Liang Ouyang; Di Wu; Chaoyang Xu; Zhiyao Yin; Ning Zhou

Archive | 2010

PLASMA CHAMBER HAVING SWITCHABLE BIAS POWER AND A SWITCHABLE FREQUENCY RF MATCH NETWORK THEREFOR

Jinyuan Chen; Gerald Yin

Archive | 2009

Plasma reaction chamber with plurality of plasma reaction zones including plurality of treatment platforms

Aihua Chen; Yijun Liu; Jinyuan Chen; Li Luo; Tuqiang Ni; Zhiyao Yin; Naiming He

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Collaboration

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Tuqiang Ni

Georgetown University

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Gerald Yin

Georgetown University

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Xueyu Qian

Georgetown University

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Zhiyou Du

Georgetown University

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Hiroshi Iizuka

Georgetown University

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Liang Ouyang

Georgetown University

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Aihua Chen

Georgetown University

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Junichi Arami

Georgetown University

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Xue-Yu Qian

Applied Materials

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Yijun Liu

Georgetown University

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