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Tuqiang Ni

Georgetown University

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Publication

Featured researches published by Tuqiang Ni.

Archive | 2007

Multi-station decoupled reactive ion etch chamber

Gerald Yin; Tuqiang Ni; Jinyuan Chen; Xueyu Qian

Archive | 2007

Multiple frequency plasma chamber, switchable rf system, and processes using same

Jinyuan Chen; Gerald Yin; Xueyu Qian; Tuqiang Ni; Hiroshi Iizuka

Archive | 2007

Decoupling reactive ion etching chamber containing multiple processing platforms

Zhiyao Yin; Tuqiang Ni; Jinyuan Chen; Xueyu Qian

Archive | 2007

Multi-station plasma reactor with multiple plasma regions

Aihua Chen; Yijun Liu; Jinyuan Chen; Lee Luo; Tuqiang Ni; Gerald Yin; Henry Ho

Archive | 2009

Capacitive cvd reactor and methods for plasma cvd process

Gerald Yin; Jinyuan Chen; Tuqiang Ni

Archive | 2010

Capacitively coupled plasma processing reactor

Jinyuan Chen; Tuqiang Ni; Zhiyao Yin

Archive | 2008

Rf power source system, and plasma chamber using the rf power source system

Jinyuan Chen; Hiroshi Iizuka; Shigyo In; Tuqiang Ni; Xue-Yu Qian; 倪圖強; 尹志堯; 錢學▲よ▼; 陳金元; 飯塚浩

Archive | 2009

Plasma reaction chamber with plurality of plasma reaction zones including plurality of treatment platforms

Aihua Chen; Yijun Liu; Jinyuan Chen; Li Luo; Tuqiang Ni; Zhiyao Yin; Naiming He

Archive | 2011

Processing device with plasma

Songlin Xu; Pierce Kelvin; Zhiyou Du; Tuqiang Ni; Benliang Lei; Jinyuan Chen; Zhiyao Yin

Archive | 2010

Radio frequency power source system and plasma reaction chamber applying same

Jinyuan Chen; Zhiyao Yin; Xueyu Qian; Tuqiang Ni; Zhonghao Fan

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Collaboration

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Jinyuan Chen

Georgetown University

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Gerald Yin

Georgetown University

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Xueyu Qian

Georgetown University

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Hiroshi Iizuka

Georgetown University

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Aihua Chen

Georgetown University

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Xue-Yu Qian

Applied Materials

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Yijun Liu

Georgetown University

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Henry Ho

Georgetown University

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Lee Luo

Georgetown University

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Zhiyou Du

Georgetown University

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