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Junichi Arami

Tokyo Electron

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Publication

Featured researches published by Junichi Arami.

Archive | 1996

One-by-one type heat-processing apparatus

Junichi Arami; Kenji Ishikawa; Masayuki Kitamura

Archive | 1992

Mount for supporting substrates and plasma processing apparatus using the same

Junichi Arami; Kazuo Fukasawa; Takashi Ito

Archive | 2004

Substrate processing apparatus and substrate processing method, high speed rotary valve, and cleaning method

Hiroshi Shinriki; Junichi Arami

Archive | 1995

Vacuum exhaust system for processing apparatus

Junichi Arami; Masayuki Kitamura; Mitsuaki Komino

Archive | 1991

Electrostatic chuck and plasma apparatus equipped therewith

Toshihisa Nozawa; Junichi Arami; Isahiro Hasegawa; Katsuya Okumura

Archive | 1991

Electrostatic chuck having a multilayer structure for attracting an object

Toshihisa Nozawa; Junichi Arami; Shinji Kubota; Isahiro Hasegawa; Katsuya Okumura

Archive | 1991

Support table for plate-like body and processing apparatus using the table

Toshihisa Nozawa; Junichi Arami; Isahiro Hasegawa; Haruo Okano

Archive | 1994

Magnetron plasma processing apparatus and processing method

Hiromi Harada; Sinji Kubota; Hiromi Kumagai; Junichi Arami; Keiji Horioka; Isahiro Hasegawa; Haruo Okano; Katsuya Okumura; Yukimasa Yoshida

Archive | 1992

Surface-heating apparatus and surface-treating method

Yoshio Ishikawa; Junichi Arami; Towl Ikeda; Teruo Iwata

Archive | 1996

Single wafer heat treatment apparatus

Junichi Arami; Hironori Yagi; Kazutsugu Aoki

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Isahiro Hasegawa

Toshiba

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Haruo Okano

Toshiba

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Toshihisa Nozawa

Tokyo Electron

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Hiromi Harada

Tokyo Electron

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Hiromi Kumagai

Tokyo Electron

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Katsuya Okumura

University of Tokyo

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Keiji Horioka

Osaka University

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Sinji Kubota

Tokyo Electron

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Yukimasa Yoshida

Toshiba

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Hiroshi Shinriki

Tokyo Electron

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