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Joachim Hartjes

Carl Zeiss AG

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Publication

Featured researches published by Joachim Hartjes.

Archive | 2009

Illumination optics for euv microlithography and illumination system and projection exposure apparatus comprising an illumination optics of this type

Damian Fiolka; Berndt Warm; Christian Steigerwald; Martin Endres; Ralf Stützle; Jens Ossmann; Ralf Scharnweber; Markus Hauf; Udo Dinger; Severin Waldis; Marc Kirch; Joachim Hartjes

Archive | 2010

Illumination optics for EUV microlithography and related system and apparatus

Damian Fiolka; Berndt Warm; Christian Steigerwald; Martin Endres; Ralf Stuetzle; Jens Ossmann; Ralf Scharnweber; Markus Hauf; Udo Dinger; Severin Waldis; Marc Kirch; Joachim Hartjes

Archive | 2006

Polarization influencing optical arrangement for e.g. projection lens system, has optical unit changing distribution in central area of beam cross section, where beam has approximate tangential polarization distribution in central area

Hagen Federau; Damian Fiolka; Joachim Hartjes; Frank Schlesener; Benyamin Slucha; Markus Walter; Markus Weiss

Archive | 2007

Mirror with a mirror carrier and projection exposure apparatus

Rutger Wevers; Andreas Seifert; Joachim Hartjes; Guenther Dengel

Archive | 2013

FACET MIRROR DEVICE

Martin Vogt; Joachim Hartjes

Archive | 2013

Arrangement for mirror temperature measurement and/or thermal actuation of a mirror in a microlithographic projection exposure apparatus

Markus Hauf; Norman Baer; Holger Walter; Joachim Hartjes

Archive | 2007

Optical element unit and method of supporting an optical element

Dirk Schaffer; Willi Heintel; Hagen Federau; Joachim Hartjes; Harald Kirchner

Archive | 2014

TRANSPORTSICHERUNG FÜR EIN OPTISCHES SYSTEM MIT FORMGEDÄCHTNISAKTUATOREN

Joachim Hartjes; Sascha Bleidistel

Archive | 2012

Optical element having a plurality of reflective facet elements

Marc Kirch; Martin Endres; Damian Fiolka; Joachim Hartjes

Archive | 2010

Facettenspiegel zum Einsatz in der Mikrolithografie

Damian Fiolka; Joachim Hartjes

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Collaboration

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Toralf Gruner

Carl Zeiss AG

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Damian Fiolka

Carl Zeiss AG

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Sascha Bleidistel

Carl Zeiss AG

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Markus Schwab

Carl Zeiss AG

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Hagen Federau

Carl Zeiss AG

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Markus Hauf

Carl Zeiss AG

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Marc Kirch

Carl Zeiss AG

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Martin Endres

Carl Zeiss AG

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Stig Bieling

Carl Zeiss AG

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Ulrich Bingel

Carl Zeiss AG

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