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Stig Bieling

Carl Zeiss AG

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Publication

Featured researches published by Stig Bieling.

Archive | 2016

Beleuchtungsoptik für die EUV-Projektionslithographie

Johannes Wangler; Markus Degünther; Stig Bieling

Archive | 2010

Lighting system for microlithographic-projection exposure system for illuminating object field in object level with illumination radiation, has two mirrors, where one mirror is flat mirror

Stig Bieling

Archive | 2010

ILLUMINATION OPTICAL UNIT FOR EUV MICROLITHOGRAPHY

Martin Endres; Sebastian Doern; Stig Bieling; Marc Kirch

Archive | 2011

Verfahren zum Zuordnen einer Pupillenfacette eines Pupillenfacettenspiegels einer Beleuchtungsoptik einer Projektionsbelichtungsanlage zu einer Feldfacette eines Feldfacettenspiegels der Beleuchtungsoptik

Martin Endres; Stig Bieling

Archive | 2012

Illumination optical unit for projection lithography

Johannes Wangler; Markus Deguenther; Stig Bieling

Archive | 2011

Field facet mirror for use in illumination lens in illumination system of projection exposure system, during extreme UV-projection-lithography to manufacture semiconductor chip, has reference bodies arranged in reference levels with vectors

Stig Bieling; Martin Endres; Marc Kirch; Markus Walter; Markus Hauf

Archive | 2011

Method for assigning pupil facet to field facet for defining illumination channel for partial bracket of illumination light, involves identifying illumination parameter, with which illumination of object field is evaluated

Martin Endres; Stig Bieling

Archive | 2014

Reflektierende Beschichtung mit optimierter Dicke

Martin Endres; Hartmut Enkisch; Stig Bieling

Archive | 2013

Mirror exchange array of set structure for illumination optics used in e.g. scanner for performing microlithography, has single mirrors of mirror exchange array unit that are set with high reflecting coating portion

Michael Patra; Stig Bieling

Archive | 2013

Baugruppe für eine Projektionsbelichtungsanlage für die EUV-Projektionslithografie

Michael Patra; Stig Bieling; Markus Degünther; Johannes Wangler

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Collaboration

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Martin Endres

Carl Zeiss AG

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Markus Degünther

Carl Zeiss AG

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Johannes Wangler

Carl Zeiss AG

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Michael Patra

Carl Zeiss AG

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Marc Kirch

Carl Zeiss AG

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Markus Hauf

Carl Zeiss AG

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Lars Wischmeier

Carl Zeiss AG

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Joachim Hartjes

Carl Zeiss AG

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Johannes Eisenmenger

Carl Zeiss AG

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Artur Högele

Carl Zeiss AG

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