Joachim Nuetzel

Metal hard mask for ild rie processing of semiconductor memory devices to prevent oxidation of conductive lines

Transistor, memory cell and method of manufacturing a transistor

Semiconductor arrangement with non-volatile memories

DRAM cell array having vertical memory cells and methods for fabricating a DRAM cell array and a DRAM

Method of forming isolation dummy fill structures

Method of manufacturing a transistor and a method of forming a memory device with isolation trenches

Transistor manufacturing method and memory device manufacturing method

Verfahren zum Herstellen isolierender Attrappen-Füllstrukturen

Production of a semiconductor memory cell has spacer elements formed by depositing a material region for a first passivating region and subsequently polishing with a stop on a common level of storage elements or a protective layer

Transistor, Speicherzelle und Verfahren zum Herstellen eines Transistors Transistor memory cell and method for manufacturing a transistor